Mohd. Salleh Ismail. (1993). Technology and application of aligned wafer bonding for three dimensional microstructures and microdevices. University of California.
Chicago Style (17th ed.) CitationMohd. Salleh Ismail. Technology and Application of Aligned Wafer Bonding for Three Dimensional Microstructures and Microdevices. Davis, Calif: University of California, 1993.
MLA (8th ed.) CitationMohd. Salleh Ismail. Technology and Application of Aligned Wafer Bonding for Three Dimensional Microstructures and Microdevices. University of California, 1993.
Warning: These citations may not always be 100% accurate.