Penyediaan dan pencirian C54 TiSi2 untuk proses Silisida litar bersepadu CMOS /
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Main Author: | |
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Format: | Thesis Book |
Language: | Malay |
Published: |
Bangi :
Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
2001
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003 | UKM | ||
005 | 20021011155400.0 | ||
008 | 020815s2001 my a m 000 0 may | ||
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090 | |a TK7874.U32 2001 tesis | ||
090 | |a TK7874 | ||
100 | 0 | |a Uda Hashim | |
245 | 1 | 0 | |a Penyediaan dan pencirian C54 TiSi2 untuk proses Silisida litar bersepadu CMOS / |c Uda Hashim |
260 | |a Bangi : |b Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, |c 2001 | ||
300 | |a xxix , 282 p. : |b ill. ; |c 30 cm. | ||
502 | |a Tesis (Doktor Falsafah) - Universiti Kebangsaan Malaysia, 2001 | ||
504 | |a Senarai rukukan : p.260-266 | ||
650 | 0 | |a Integrated circuits | |
650 | 0 | |a Silicides | |
650 | 0 | |a Semiconductors | |
907 | |a .b13076024 |b 15-10-20 |c 12-11-19 | ||
998 | |a t |b 08-02-02 |c m |d x |e - |f may |g my |h 0 | ||
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991 | |a Koleksi Arkib | ||
991 | |a Fakulti Kejuruteraan | ||
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