Design, fabrication, and optimization of micromechanical flexures /

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Bibliographic Details
Main Author: Cho, Young-Ho
Format: Thesis Book
Language:English
Published: Berkeley : University of California, 1990
Subjects:
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245 1 0 |a Design, fabrication, and optimization of micromechanical flexures /  |c by Young-Ho Cho 
260 |a Berkeley :  |b University of California,  |c 1990 
300 |a xvii, 116 p. :  |b ill. ;  |c 18 cm. 
502 |a Thesis (Ph.D.) - University of California, Berkeley, 1990 
504 |a References : p. 100-105 
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650 0 |a Micromechanics 
650 0 |a Microelectromechanical systems 
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