Electrostatic comb drive for resonant sensor and actuator applications /

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Bibliographic Details
Main Author: Tang, William Chi-Keung
Format: Thesis Book
Language:English
Published: Barkeley : University of California, 1990
Subjects:
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100 1 |a Tang, William Chi-Keung 
245 1 0 |a Electrostatic comb drive for resonant sensor and actuator applications /  |c by Willian Chi-Keung Tang 
260 |a Barkeley :  |b University of California,  |c 1990 
300 |a xiii, 212 p. :  |b ill. ;  |c 18 cm. 
502 |a Thesis (Ph.D.) - University of California, Barkeley, 1990 
504 |a References : p. 156-163 
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650 0 |a Actuators 
650 0 |a Resonance 
650 0 |a Electromechanical devices 
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