Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | Malay |
| Published: |
Bangi :
Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
2008
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| Subjects: | |
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|---|---|---|---|
| 003 | UKM | ||
| 005 | 20090213161200.0 | ||
| 008 | 090112s2008 my dao m 000 0 may d | ||
| 039 | 9 | |a 200902131612 |b jamil |c 200902110937 |d ruzita |y 01-12-2009 |z norehan | |
| 040 | |a UKM | ||
| 090 | |a TL589.2.A3M835 2008 tesis | ||
| 090 | |a TL589.2.A3 |b M835 2008 | ||
| 100 | 0 | |a Mohd Ismahadi Syono | |
| 245 | 1 | 0 | |a Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal / |c Mohd Ismahadi Syono |
| 260 | |a Bangi : |b Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, |c 2008 | ||
| 300 | |a xvi, 187 p. : |b ill., photographs, charts ; |c 30 cm. | ||
| 502 | |a Tesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008 | ||
| 504 | |a Rujukan : p. [153]-156 | ||
| 610 | 2 | 0 | |a Universiti Kebangsaan Malaysia |x Dissertations |
| 650 | 0 | |a Dissertations, Academic |z Malaysia | |
| 650 | 0 | |a Accelerometers | |
| 650 | 0 | |a Microelectromechanical systems | |
| 653 | 1 | |a Thick epitaxial polysilicon | |
| 907 | |a .b14332188 |b 15-10-20 |c 12-11-19 | ||
| 998 | |a t |b 01-12-09 |c m |d x |e - |f may |g my |h 0 | ||
| 914 | |a vtls003391930 | ||
| 990 | |a nmk/rz | ||
| 991 | |a Fakulti Kejuruteraan | ||
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