Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | Malay |
| Published: |
2010.
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| LEADER | 01372nam a2200349 a 4500 | ||
|---|---|---|---|
| 003 | UKM | ||
| 005 | 20120112144900.0 | ||
| 008 | 111215r2010 my dao m 000 0 may | ||
| 039 | 9 | |a 201201121449 |b lan |c 201201061540 |d hendon |y 12-15-2011 |z zarina | |
| 040 | |a UKM | ||
| 090 | |a TP248.25.B54M85 2010 tesis 3 | ||
| 090 | |a TP248.25 .B54 |b M85 2010 3 | ||
| 100 | 0 | |a Muhammad Ramdzan Buyong. | |
| 245 | 1 | 0 | |a Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS / |c Muhammad Ramdzan bin Buyong. |
| 260 | |c 2010. | ||
| 300 | |a xxvi, 201 p. : |b ill. charts, photographs, ; |c 30 cm. | ||
| 502 | |a Tesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010. | ||
| 504 | |a Rujukan : p. 194-198. | ||
| 610 | 2 | 0 | |a Universiti Kebangsaan Malaysia |x Dissertations. |
| 650 | 0 | |a Dissertations, Academic |z Malaysia. | |
| 650 | 0 | |a BioMEMS. | |
| 650 | 0 | |a Metal oxide semiconductors. | |
| 650 | 0 | |a Detectors. | |
| 650 | 0 | |a Microelectronics. | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Electromechanical devices. | |
| 907 | |a .b15212105 |b 28-05-21 |c 12-11-19 | ||
| 998 | |a l0013 |b 12-02-11 |c m |d x |e - |f may |g my |h 0 | ||
| 914 | |a vtls003484609 | ||
| 990 | |a szj/ha | ||
| 991 | |a Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN) | ||
| 945 | |g 1 |i 00002049191 |j 0 |l l0013 |n No. of pieces: 1 |o - |p MYR0.00 |q - |r - |s - |t 3 |u 0 |v 0 |w 0 |x 0 |y .i19931104 |z 12-11-19 | ||