Precision micro-scaled partial ductile mode machining of silicon /

Precision micro-scaled partial ductile mode machining of silicon /

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書目詳細資料
主要作者:	Alao, Abdur-Rasheed
格式:	Thesis
語言:	English
出版:	Gombak : Kulliyyah of Engineering, International Islamic University Malaysia, 2007
主題:	Microelectromechanical systems Silicon-on-insulator technology Theses, IIUM local
在線閱讀:	Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library.
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