Effect of focused ion beam machining parameters on geometrical accuracy of Bio-MEMS /
This thesis introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...
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| Format: | Thesis |
| Language: | English |
| Published: |
Gombak, Selangor :
Kulliyyah of Engineeering, International Islamic University Malaysia,
2011
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| Subjects: | |
| Online Access: | Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library. |
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