Effect of focused ion beam machining parameters on geometrical accuracy of Bio-MEMS /

Effect of focused ion beam machining parameters on geometrical accuracy of Bio-MEMS /

This thesis introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...

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书目详细资料
主要作者:	Nurul Hajar binti Mohd Fuad
格式:	Thesis
语言:	English
出版:	Gombak, Selangor : Kulliyyah of Engineeering, International Islamic University Malaysia, 2011
主题:	Focused ion beams BioMEMS Theses, IIUM local
在线阅读:	Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library.
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