Zinc oxide and aluminium nitrite CMOS-MEMS surface acoustic wave resonator for RF applications /
The increase in frequency spectrum for wireless communication system has led to the growing interest of thin film electroacoustic technology that scale favourably upon miniaturization. To date, current off chip SAW resonators are made from bulk piezoelectric materials and cannot be easily integrated...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
Gombak, Selangor :
Kulliyyah of Engineering, International Islamic University Malaysia,
2016
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| Subjects: | |
| Online Access: | Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library. |
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