Ion beam micromachining of crystalline solids /
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
Singapore :
Nanyang Technological University,
2002
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| Subjects: | |
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| Physical Description: | xxvii, 194 leaves : illustrations ; 30 cm. |
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| Bibliography: | Includes bibliographical references (leaves 180-194). |