Modelling of the reliability baseline for process control monitoring of kerf structures /

Modelling of the reliability baseline for process control monitoring of kerf structures /

Miniaturization of Metal-Oxide-Semiconductor Field Effect Transistors (MOSFET) beyond 0.1 μm has caused problems like short channel effect and leakage current which has lead to reliability issues. Therefore, reliability monitoring for miniaturized MOSFET is crucial in today's semiconductor indu...

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書目詳細資料
主要作者:	Ismah Binti Izuddin
格式:	Thesis
語言:	English
出版:	Kuala Lumpur: Kulliyyah of Engineering, International Islamic University Malaysia, 2012
主題:	Reliability (Engineering) Computer software > Reliability Reliability (Engineering) > Mathematical models Theses, IIUM local
在線閱讀:	http://studentrepo.iium.edu.my/handle/123456789/5000
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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