A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering
This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the p...
Saved in:
Main Author: | |
---|---|
Format: | Thesis |
Published: |
2011
|
Subjects: | |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
id |
my-mmu-ep.3840 |
---|---|
record_format |
uketd_dc |
spelling |
my-mmu-ep.38402013-02-25T00:38:28Z A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering 2011 Hoon , Jian Wei QC Physics This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the processing technology for the fabrication of ZnO films. 2011 Thesis http://shdl.mmu.edu.my/3840/ http://vlib.mmu.edu.my/diglib/login/dlusr/login.php masters Multimedia University Faculty of Engineering |
institution |
Multimedia University |
collection |
MMU Institutional Repository |
topic |
QC Physics |
spellingShingle |
QC Physics Hoon , Jian Wei A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering |
description |
This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the processing technology for the fabrication of ZnO films. |
format |
Thesis |
qualification_level |
Master's degree |
author |
Hoon , Jian Wei |
author_facet |
Hoon , Jian Wei |
author_sort |
Hoon , Jian Wei |
title |
A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering |
title_short |
A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering |
title_full |
A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering |
title_fullStr |
A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering |
title_full_unstemmed |
A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering |
title_sort |
study of material properties of zn0 thin films deposited by direct current magnetron sputtering |
granting_institution |
Multimedia University |
granting_department |
Faculty of Engineering |
publishDate |
2011 |
_version_ |
1747829555453755392 |