Fabrication and characterisation of magnetron sputtered copper thin films

Applications of copper (Cu) thin films have emerged from microelectronics to nanotechnology. The primary applications of Cu are as interconnects in microelectronics. With the rapid shrinking in the size of electronic devices, the Cu thin films play an essential role in conductors and optical data st...

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Bibliographic Details
Main Author: Krishnasamy, Jegenathan
Format: Thesis
Published: 2011
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