Dielectric properties of iron doped barium strontium titanate thin film based capacitor
In this research work, a new capacitor stack aluminium/iron doped barium strontium titanate/nickel iron/copper (Al/BSTF/NiFe/Cu) has been designed and fabricated with aluminium (Al) as top electrode, iron doped barium strontium titanate (Ba 1-x Sr x Ti 1-y Fe y O3) as dielectric material and nickel-...
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| 格式: | Thesis |
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2015
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