Characterization of fluorine upon implant sequence on p-metal oxide semiconductor (PMOS) and P+/N-Junction schottky diode in BiCMOS technology / Siti Zubaidah Md Saad
Fluorine (F) is known as a reactive species that capable to form a variety of complex defects. It beneficial effect as well as the detrimental effect to the electrical and physical characterization of devices have been studied by many researchers. The effect of F to the electrical results such as re...
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Main Author: | Md Saad, Siti Zubaidah |
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Format: | Thesis |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | https://ir.uitm.edu.my/id/eprint/12039/1/TM_SITI%20ZUBAIDAH%20MD%20SAAD%20EE%2014_5%201.pdf |
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