Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon

Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon

This study focused on development of nanostructured ZnO thin films based metal-semiconductor-metal (MSM) gas sensor by sol gel spin coating method. There were three stages that has been studied to fabricate nanostructured ZNO based MSM gas sensor which are: (a) preparation of ZnO thin films by spin...

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Main Author: Hosnon, Mohd Hannas
Format: Thesis
Language:English
Published: 2018
Subjects:
Electricity
Online Access:https://ir.uitm.edu.my/id/eprint/62940/2/62940.pdf
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spelling my-uitm-ir.629402024-07-31T01:53:32Z Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon 2018-08 Hosnon, Mohd Hannas Electricity Detectors. Sensors. Sensor networks This study focused on development of nanostructured ZnO thin films based metal-semiconductor-metal (MSM) gas sensor by sol gel spin coating method. There were three stages that has been studied to fabricate nanostructured ZNO based MSM gas sensor which are: (a) preparation of ZnO thin films by spin coating method (b) preparation of Sn doped ZnO thin films by spin coating method and (c) fabrication of nanostructured ZnO based MSM based sensor. The preparation of ZnO thin films were deposited using spin coating with 10 layers and annealing temperature (350 to 500°C) of ZnO thin film were determined. For preparation on nanostructured n-type doped ZnO thin films by spin coating method, effect of annealing temperature (350 to 500°C) and effect of n-type dopant (Sn concentration 0.2-1.0 at.%) on nanostructured ZnO were studied. X-ray diffraction (XRD), Field emission scanning electron microscope (FESEM), energy dispersive X-ray (EDS) and atomic force microscopy (AFM) were used to characterise the structural properties of nanostructured ZnO thin films. The UV-Vis-NIR spectrometer was employed to study the optical properties determination. The electrical properties were characterized by using current-voltage (I-V) measurement (Keithley 2400) to characterize the resistivity, conductivity and the electrical resistance behaviour of the thin films. Then, gold (Au) was deposited on nanostructured ZnO as an electrode to fabricate nanostructured ZnO based MSM gas sensor. The gas sensor devices have been characterized using current-voltage (I-V) measurement system to measure the sensitivity, response time and the recovery time. The O2 oxygen gas with flow rate 20 seem has been used for fabricated nanostructured ZnO thin film based gas sensor testing. The highest sensitivity behaviour of nanostructured Sn doped ZnO thin films with 1.0 at.% were determined to detect 20 seem of oxygen (O2) gas at room temperature which found to be 12.56%. 2018-08 Thesis https://ir.uitm.edu.my/id/eprint/62940/ https://ir.uitm.edu.my/id/eprint/62940/2/62940.pdf text en public masters Universiti Teknologi MARA Faculty of Electrical Engineering Mahmood, Mohamad Rusop (Prof. Dr.)
institution Universiti Teknologi MARA
collection UiTM Institutional Repository
language English
advisor Mahmood, Mohamad Rusop (Prof. Dr.)
topic Electricity
Electricity
spellingShingle Electricity
Electricity
Hosnon, Mohd Hannas
Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon
description This study focused on development of nanostructured ZnO thin films based metal-semiconductor-metal (MSM) gas sensor by sol gel spin coating method. There were three stages that has been studied to fabricate nanostructured ZNO based MSM gas sensor which are: (a) preparation of ZnO thin films by spin coating method (b) preparation of Sn doped ZnO thin films by spin coating method and (c) fabrication of nanostructured ZnO based MSM based sensor. The preparation of ZnO thin films were deposited using spin coating with 10 layers and annealing temperature (350 to 500°C) of ZnO thin film were determined. For preparation on nanostructured n-type doped ZnO thin films by spin coating method, effect of annealing temperature (350 to 500°C) and effect of n-type dopant (Sn concentration 0.2-1.0 at.%) on nanostructured ZnO were studied. X-ray diffraction (XRD), Field emission scanning electron microscope (FESEM), energy dispersive X-ray (EDS) and atomic force microscopy (AFM) were used to characterise the structural properties of nanostructured ZnO thin films. The UV-Vis-NIR spectrometer was employed to study the optical properties determination. The electrical properties were characterized by using current-voltage (I-V) measurement (Keithley 2400) to characterize the resistivity, conductivity and the electrical resistance behaviour of the thin films. Then, gold (Au) was deposited on nanostructured ZnO as an electrode to fabricate nanostructured ZnO based MSM gas sensor. The gas sensor devices have been characterized using current-voltage (I-V) measurement system to measure the sensitivity, response time and the recovery time. The O2 oxygen gas with flow rate 20 seem has been used for fabricated nanostructured ZnO thin film based gas sensor testing. The highest sensitivity behaviour of nanostructured Sn doped ZnO thin films with 1.0 at.% were determined to detect 20 seem of oxygen (O2) gas at room temperature which found to be 12.56%.
format Thesis
qualification_level Master's degree
author Hosnon, Mohd Hannas
author_facet Hosnon, Mohd Hannas
author_sort Hosnon, Mohd Hannas
title Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon
title_short Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon
title_full Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon
title_fullStr Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon
title_full_unstemmed Electrical properties of Sn doped ZnO thin films deposited by sol gel spin coating method for MSM gas sensor applications / Mohd Hannas Hosnon
title_sort electrical properties of sn doped zno thin films deposited by sol gel spin coating method for msm gas sensor applications / mohd hannas hosnon
granting_institution Universiti Teknologi MARA
granting_department Faculty of Electrical Engineering
publishDate 2018
url https://ir.uitm.edu.my/id/eprint/62940/2/62940.pdf
_version_ 1811768635506556928

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