Fabrication of porous silicon nanostuctures chemical sensor / Mohd Husairi Fadzilah Suhaimi
Porous Silicon Nanostructures (PSiN) was prepared by electrochemical etching using ptype Si wafer substrate with constant current density, 20 mA/cm2. Ethanoic hydrofluoric acid (HF) 48% electrolyte and ethanol (C2H5OH) at ratio 1:1 electrolyte was used. The sample was characterized by using Photolum...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2010
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| Online Access: | https://ir.uitm.edu.my/id/eprint/72745/1/72745.pdf |
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