Measurement of dielectric constant of silicon wafer using microwave non-destrictive testing and direct current technique / Nadia Md Kamal
This paper presents comparison between measurement of dielectric constant of silicon wafer by using MNDT which is at high frequency and by using HIOKI 3532-50 LCR HiTESTER which at low frequency. Measurement of dielectric properties of silicon wafer at microwave frequencies is performed in free spac...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 語言: | English |
| 出版: |
2010
|
| 主題: | |
| 在線閱讀: | https://ir.uitm.edu.my/id/eprint/81107/1/81107.pdf |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|