Surface morphology, optical and electrical properties of porous silicon produced by chemical etching
In past decades, silicon is commonly used in the semiconductor industry. Recently, researcher extensively studied the porous silicon produced by electrochemical etching because there is possibility to develop a new approach in developing optoelectronic devices, solar cell and sensor. In this researc...
Saved in:
Main Author: | |
---|---|
Format: | Thesis |
Language: | English |
Subjects: | |
Online Access: | http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/1/QC%206118%20.S5%20T4%202011%20Abstract.pdf http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/2/QC%206118%20.S5%20T4%202011%20FullText.pdf |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
id |
my-umt-ir.-3010 |
---|---|
record_format |
uketd_dc |
spelling |
my-umt-ir.-30102014-05-18T06:43:31Z Surface morphology, optical and electrical properties of porous silicon produced by chemical etching Tham, Dwight Jern Ee In past decades, silicon is commonly used in the semiconductor industry. Recently, researcher extensively studied the porous silicon produced by electrochemical etching because there is possibility to develop a new approach in developing optoelectronic devices, solar cell and sensor. In this research, the Porous Silicon (PS) was fabricated by chemical etching method on the P-type silicon wafer in the mixture of hydrofluoric acid (HF) etchant with different concentration of nitric acid(HN03) of 20%, 40%, 65% and at different etching time of 5, 10, 15, 20, 25 minutes. Terengganu: Universiti Malaysia Terengganu 2011-09 Thesis en http://dspace.psnz.umt.edu.my/xmlui/handle/123456789/3010 http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/1/QC%206118%20.S5%20T4%202011%20Abstract.pdf 47491ac1e0746683ebaf5409fec04ae1 http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/2/QC%206118%20.S5%20T4%202011%20FullText.pdf c8b93a829536f3da3b80e800fb1d9975 http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/3/license.txt 8a4605be74aa9ea9d79846c1fba20a33 QC 6118 .S5 T4 2011 Tham, Dwight Jern Ee Tesis FST 2011 Porous silicon |
institution |
Universiti Malaysia Terengganu |
collection |
UMT Repository System |
language |
English |
topic |
QC 6118 .S5 T4 2011 QC 6118 .S5 T4 2011 Tesis FST 2011 Porous silicon |
spellingShingle |
QC 6118 .S5 T4 2011 QC 6118 .S5 T4 2011 Tesis FST 2011 Porous silicon Tham, Dwight Jern Ee Surface morphology, optical and electrical properties of porous silicon produced by chemical etching |
description |
In past decades, silicon is commonly used in the semiconductor industry. Recently, researcher extensively studied the porous silicon produced by electrochemical etching because there is possibility to develop a new approach in developing optoelectronic devices, solar cell and sensor. In this research, the Porous Silicon (PS) was fabricated by chemical etching method on the P-type silicon wafer in the mixture of hydrofluoric acid (HF) etchant with different concentration of nitric acid(HN03) of 20%, 40%, 65% and at different etching time of 5, 10, 15, 20, 25 minutes. |
format |
Thesis |
author |
Tham, Dwight Jern Ee |
author_facet |
Tham, Dwight Jern Ee |
author_sort |
Tham, Dwight Jern Ee |
title |
Surface morphology, optical and electrical properties of porous silicon produced by chemical etching |
title_short |
Surface morphology, optical and electrical properties of porous silicon produced by chemical etching |
title_full |
Surface morphology, optical and electrical properties of porous silicon produced by chemical etching |
title_fullStr |
Surface morphology, optical and electrical properties of porous silicon produced by chemical etching |
title_full_unstemmed |
Surface morphology, optical and electrical properties of porous silicon produced by chemical etching |
title_sort |
surface morphology, optical and electrical properties of porous silicon produced by chemical etching |
granting_institution |
Terengganu: Universiti Malaysia Terengganu |
url |
http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/1/QC%206118%20.S5%20T4%202011%20Abstract.pdf http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/2/QC%206118%20.S5%20T4%202011%20FullText.pdf |
_version_ |
1747835855795388416 |