Fabrication and characterization of microfluidic field effect transistor on silicon substrate

The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...

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Bibliographic Details
Main Author: Maizatul, Zolkapli
Format: Thesis
Language:English
Subjects:
Online Access:http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12923/1/p.%201-24.pdf
http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12923/2/Full%20Text.pdf
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