The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor
Metal-Oxide-Semiconductor field effect transistor (MOSFET) forms the basis in most of electronic applications. In certain part of electronic circuitry, there is a requirement to use depletion mode of MOSFET which delivers current at Vg=0V. This type of transistor is normally on unless reverse-pola...
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my-unimap-14502009-08-14T08:53:30Z The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor Hazian, Mamat Metal-Oxide-Semiconductor field effect transistor (MOSFET) forms the basis in most of electronic applications. In certain part of electronic circuitry, there is a requirement to use depletion mode of MOSFET which delivers current at Vg=0V. This type of transistor is normally on unless reverse-polarity Vg is applied to turn it off. In this research, thorough investigations on process parameters that affect the performance of depletion mode transistor have been studied. The study was emphasized on the ion implantation to forms the depletion channel. It is a very crucial process step in creating a successful depletion type MOSFET. To support the study, Design of Experiment (DOE) for ion implantation dose and energy has been implemented in MIMOS fabrication facility. The 0.5um CMOS process technology was used as a baseline to produce n-type depletion mode MOSFET. Besides running the experiment, simulation software (ATHENA and ATLAS) were used in this study to reduce the cost and time of producing experiment wafers. Comparison of experiment test results and simulation output was also discussed in details in this thesis. On the other hand, problems and observations from the experiment were highlighted and discussed too. One of the main issues is on the two-peak point of transconductance curve. According to the experimental results, it can found that phosphorus ion with dose 3.3e12 cm-2 and energy 60 keV used in depletion channel implant should produce good characteristics of depletion mode MOSFET with threshold voltage -0.7 V. Universiti Malaysia Perlis 2008 Thesis en http://dspace.unimap.edu.my/123456789/1450 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/1450/2/Page%201-24.pdf 63f18b1d4f82b0c18cab4241eb76f406 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/1450/3/Full%20text.pdf fae59f688f1b9264abae9201b01b8b43 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/1450/4/license.txt 2fcfb79745579e98631d8ae4e73f8af2 Transistors Metal Oxide Semiconductor Field Effect Transistor (MOSFET) Metal oxide semiconductors Field effect transistors (FETs) Silicon ATLAS (Computer program language) School of Microelectronic Engineering |
| institution |
Universiti Malaysia Perlis |
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UniMAP Institutional Repository |
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English other English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English other English English English English English English English English English English English English English English English other English English English English English English English English English English English English English English English English English English English other English English English English English English English English English English English English |
| advisor |
Prof. Dr. Uda Hashim Saiful Azhar Saad |
| topic |
Transistors Metal Oxide Semiconductor Field Effect Transistor (MOSFET) Metal oxide semiconductors Field effect transistors (FETs) Silicon ATLAS (Computer program language) Dolomite rock -- Perlis Dolomite Composites Batu Reput Materials engineering Thermosite Robotics Robots -- Design and construction Mobile robots Detectors Autonomous navigation Artificial intelligence Face Emotion Recognition(FER) Detectors Genetic algorithm (GA) Neural network Biomedical sensors Fused deposition modeling (FDM) Rapid prototyping Surface roughness Surface quality Microsoft Visual BASIC -- Software Surface Roughness Based Visual and Analysis (SRVA) Microprocessors VLIW microprocessor Microprocessors -- Design and construction Field programmable gate arrays Very Long Instruction Word (VLIW) Integrated circuits Composites Cobalt implant composite (CIC) Materials engineering Chromium Biomaterials Metal matrix composite Powder metallurgy Orthopedic biomaterials Electronic claims Web-based claims system UniMAP -- Bursary Department Computer engineering Web-based claims system -- Design and construction UniMAP -- Administration Database management Silicon Nanowires Nanotechnology Nanowires -- Design and construction Nanostructured materials Composite materials Engineering design Manufacturing defects -- Analysis Manufacturing defects -- Reduction Sandwich construction Composite construction -- Fatigue Manufactures -- Engineering Face recognition Algorithms Artificial intelligent (AI) Computer vision Artificial neural network Facial features cropping Polystyrene lightweight aggregate Concrete Lightweight aggregate concrete (LWAC) Manufacturing industry Microstructure Alluminium alloy Composite Glass particulates Aluminium-copper alloy Basal stem rot (BSR) Electronic nose Odour Plant disease Oil palm industry Artificial neural networks (ANN) Ganoderma boninense Microelectronic package Temperature cycling Solder joint fatigue life Thermal cycling test Ball grid array (BGA) Finite elements analysis (FEA) Corrosion Alumina Saffil short fibres Metal matrix composites (MMCs) Aluminium matrix composites (ACMs) Powder metallurgy (PM) Ethylene propylene diene terpolymer (EPDM) Polypropylene (PP) Polymer Calcium carbonate (CaCO3) Dynamic vulcanization (DV) composites Composite materials Quantum dot single-electron transistor (QD SET) Transistor Nano devices ma-N 2403 PMMA 495 K Data acquisition Single board computer (SBC) Portable Embedded Sensing System (PESS) Embedded system Field programmable gate arrays (FPGA) Personal computers (PC) Data acquisition systems (DAS) Fuzzy logic controller (FLC) Pico-statellite attitude Aerospace Statellite system Adaptive Predictive Fuzzy Logic Controller (APFLC) Genetic algorithm (GA) Attitude control Quality Manufacturing industry Quality management systems Tools and techniques AC induction motor Rotor bar Rotating transformer Opera 2D Voice classification Linear classifier Non-linear classifier Voice disorder Intelligent diagnosing system Controlled robot chair Brain machine interface (BMI) Electroencephalography (EEG) Wheel chair Intelligent Transportation Systems (ITS) Voice controlled interfaces Car like mobile platform (CLMP) Information Technology (IT) Modern communication A357 alloy Damping mechanisms Stainless steel composites Network Traffic Monitoring System Single board computer (SBC) Network traffic Embedded system Linux Printed Circuit Board (PCB) Cu(II) Zn(II) Fe(III) Ni(II) MC-Xs Cyanex 272 Blood pressure Silent killer Electrocardiography (ECG) sensor Pulse sensor Embedded system Embedded Network Security System (ENSS) Single Board Computer (SBC) Network security Sugarcane bagasse Rice straw Carbon Agricultural waste Heavy metal ions removal Antenna Fractal planar inverted F antenna (F-PIFA) Wireless communication system Mobile application T-joint Flux density Power loss Transformer 100kVA Distribution Transformer Free Space Optic (FSO) Telecommunication Weather Attenuation Mobile robot Neural network Vision system Optical code Optical Code Division Multiple Access (OCDMA) Multiple access interference (MAI) Optical networks Mobile communication networks Random Diagonal (RD) code Embedded system technology Embedded system vision Single Board Computer (SBC) Traffic surveillance video Virtual architectural walkthrough Windows Linux Operating systems Virtual reality Paddy field irrigation -- Perlis Solar powered water pump Photovoltaic (PV) Solar radiation Paddy production Agricultural Rice production Hargreaves Rice straw Pyrolysis proses Catalytic pyrolysis Bio-oil Agricultural wastes Biomass Plasma Plasma arc cutting Modern industry Advanced machining Composites Low density polyethylene (LDPE) Acrylonitrile butadiene styrene (ABS) Water hyacinth fibers (WHF) LDPE/ABS/WHF composites Polyethylene (PE) Waste printed circuit boards (PCBs) Recovery metals Environmental issues Recyclable material Chitosan Chitosan biocomposites Recycled polyethylene (RPE) Biocomposites Polymer Plastic Polyurethane foam Waste paper Foam composites Waste paper foam composites Old newspaper (ONP) Triethylene diamine (TEDA Anodic aluminium oxide (AAO) film Anodising process Electronic Eggshell powder Polymer composites Low density polyethylene (LDPE) LDPE/ABS/ESP Polyethylene (PE) Acrylonitrile butadiene styrene (ABS) Composites NaOH treatment Tert-butyl perbenzoate Bagasse fiber composites Sugarcane bagasse Polyester composites Natural fiber Aluminium Recycled aluminium alloy cylinder head Alluminium alloys A319 alloy Heat treatment Refuse-derived plastic Expanded Polystyrene (EPS) Used deep-fried oil (UDFO) Plastic Waste materials Polystyrene Washing process Mechanical washing principle Cloth cleaning Hydrodynamic Water jet Varistor ZnO Bahan seramik Pengisaran Natural rubber latex Latex Prevulcanized natural rubber latex films Dipping process Latex manufacturing Polyester composites Palm kernel shell (PKS) Unsaturated polyester (UP) Polymer composites Composite materials Manufacturing industry Geopolymers Inorganic polymers Mineral polymers Fly ash Geopolymerization process Alkaline activator Alloy Biomaterial Hydroxyapatite (HAP) Natural materials Corrosion Chitosan Sensor Sensing materials Chitosan thin films Coconut shell Polymer composites ABS/EPDM composites Composite materials Embedded operating system Face recognition systems Linux kernel Special-purpose computer system Compiler system Operating system Eggshells powder (ESP) Polymer composites Eggshells powder filled low density polyethylene (LDPE/ESP) Polyethylene composites Heat treatment Alluminium alloys piston Piston Aluminium Concentric pipes heat exchanger Heat exchanger Numerical investigation Finite element method Consonant-Vowel (CV) Vowel recognition Automatic Speech Recognition (ASR) Linear Discriminat Analysis (LDA) Robustness analysis Malays vowel analysis Wireless application Demodulator Mobile communication devices Communication technology Signal generator Radio transceiver Ion Sensitive Field Effect Transistor (ISFET) Potential Hydrogen (pH) pH sensitivity CMOS ISFET Simulation CMOS technology CMOS Transistor Silicon substrate Microfluidic FET Microelectronics Field effect transistor (FET) Nanogap biosensor Nanotechnology Protein detection Deoxyribonucleic acid (DNA) Tuberkulosis (TB) Kesihatan Mycobacterium Tuberkulosis Kahak Ziehl-Neelsen (ZN) Sistem Diagnosis Pintar Leaching system Gold leaching process Gold scraps Ascorbic acid Blood pressure Silent killer Systolic blood pressure (SBP) Health care Antenna technology Mobile communication Wireless application Fractal planar inverted F antenna (F-PIFA) Fructose palmitate (sugar ester) Enzymatic esterification Palmitic acid Cassava starch Bioethanol production Manihot esculenta Glucose Pressurized hot water extraction (PHWE) Diplazium esculentum Herbal medicines Antioxidant activity Microcontroller-based inverter Photovoltaic systems Switching pulse Electricity AC induction motor Rotor bar material Induction motor rotor slot Multiplier Modified Booth Multiplier (MBM) Modified Booth Encoding (MBE) Computer architecture EMG signals Biceps brachii muscle MATLAB-based system Human anatomy Agro-based products Taste sensing system (TSS) Graphical user interface (GUI) Low density polyethylene (LDPE) Natural rubber (NR) Fillers Silica composite Corn starch Coconut husk Glucose oxidase (GOx) Aspergillus niger Penicllium sp. GOx-producing strain Aspergillus terreus UniMAP AA-1 Ultrasonic sensors Aspergillus niger Microorganism activity Computer-Aided Design (CAD) Permittivity Measurement System (PMS) Nanogap capacitor Total Harmonic Distortation (THD) Molecularly imprinted polymer (MIP) Turmeric Curcuma longa Curcumin purification Chitosan filled polypropylene (PP) Chitosan Acrylic acid Sodium dodecyl sulfate (SDS) Speech dysfluencies Speech Communication Productivity calculation Assembly line Balancing Optimization Tingkah Laku Kognitif Standard [CBT(S)] Tingkah Laku Kognitif Brief [CBT(B)] Estim kendiri (EK) Lokus kawalan (LK) Penagih dadah Cement composite Coconut fibre Compressive strength Crack propagation Sabut kelapa Materials engineering TCP-Friendly Rate Control (TFRC) Transmission control protocol Transport Control Protocol (TCP) Real-time data transmission Network engineering Unmanned Aerial Vehicle (UAV) Flight Control Board (FCB) Quadrotor PID controller Attitude control PID controllers Mobile Autonomous Robot (MAR) Control systems implementations Intelligent autonomous mobile robot Wheeled mobile robot Cascade control system 3D Pattern Recognition Intelligent manipulator 3D Hand Replication Human Computer Interaction Morphology Machining process Machine tools Machining mode Optimization Cost effectiveness Maximum productivity Wind turbine design Electrical energy Vertical Axis Wind Turbine Electricity Mechanical energy Impeller wind turbine Thin films BST thin films Sol-gel technique Barium strontium titanate (BST) FeFET Applications Vehicle Noise Comfort Index (VNCI) Interior noise comfort Artificial neural network Car interior noise Automobiles -- Component and parts Noise control Automobiles -- Interior acoustic Code length Multiple access interference (MAI) Optical Code Division Multiple Access (OCDMA) OCDMA system Wireless communication systems Optical network Optical Code Division Multiple Access (OCDMA) Spectral amplitude coding (SAC) Optical networks Mobile communication networks Optical code Zero cross correlation Optical fiber communication Video compression Video encoding Motion estimation (ME) Fast search algorithms Video data transferring |
| spellingShingle |
Transistors Metal Oxide Semiconductor Field Effect Transistor (MOSFET) Metal oxide semiconductors Field effect transistors (FETs) Silicon ATLAS (Computer program language) Dolomite rock -- Perlis Dolomite Composites Batu Reput Materials engineering Thermosite Robotics Robots -- Design and construction Mobile robots Detectors Autonomous navigation Artificial intelligence Face Emotion Recognition(FER) Detectors Genetic algorithm (GA) Neural network Biomedical sensors Fused deposition modeling (FDM) Rapid prototyping Surface roughness Surface quality Microsoft Visual BASIC -- Software Surface Roughness Based Visual and Analysis (SRVA) Microprocessors VLIW microprocessor Microprocessors -- Design and construction Field programmable gate arrays Very Long Instruction Word (VLIW) Integrated circuits Composites Cobalt implant composite (CIC) Materials engineering Chromium Biomaterials Metal matrix composite Powder metallurgy Orthopedic biomaterials Electronic claims Web-based claims system UniMAP -- Bursary Department Computer engineering Web-based claims system -- Design and construction UniMAP -- Administration Database management Silicon Nanowires Nanotechnology Nanowires -- Design and construction Nanostructured materials Composite materials Engineering design Manufacturing defects -- Analysis Manufacturing defects -- Reduction Sandwich construction Composite construction -- Fatigue Manufactures -- Engineering Face recognition Algorithms Artificial intelligent (AI) Computer vision Artificial neural network Facial features cropping Polystyrene lightweight aggregate Concrete Lightweight aggregate concrete (LWAC) Manufacturing industry Microstructure Alluminium alloy Composite Glass particulates Aluminium-copper alloy Basal stem rot (BSR) Electronic nose Odour Plant disease Oil palm industry Artificial neural networks (ANN) Ganoderma boninense Microelectronic package Temperature cycling Solder joint fatigue life Thermal cycling test Ball grid array (BGA) Finite elements analysis (FEA) Corrosion Alumina Saffil short fibres Metal matrix composites (MMCs) Aluminium matrix composites (ACMs) Powder metallurgy (PM) Ethylene propylene diene terpolymer (EPDM) Polypropylene (PP) Polymer Calcium carbonate (CaCO3) Dynamic vulcanization (DV) composites Composite materials Quantum dot single-electron transistor (QD SET) Transistor Nano devices ma-N 2403 PMMA 495 K Data acquisition Single board computer (SBC) Portable Embedded Sensing System (PESS) Embedded system Field programmable gate arrays (FPGA) Personal computers (PC) Data acquisition systems (DAS) Fuzzy logic controller (FLC) Pico-statellite attitude Aerospace Statellite system Adaptive Predictive Fuzzy Logic Controller (APFLC) Genetic algorithm (GA) Attitude control Quality Manufacturing industry Quality management systems Tools and techniques AC induction motor Rotor bar Rotating transformer Opera 2D Voice classification Linear classifier Non-linear classifier Voice disorder Intelligent diagnosing system Controlled robot chair Brain machine interface (BMI) Electroencephalography (EEG) Wheel chair Intelligent Transportation Systems (ITS) Voice controlled interfaces Car like mobile platform (CLMP) Information Technology (IT) Modern communication A357 alloy Damping mechanisms Stainless steel composites Network Traffic Monitoring System Single board computer (SBC) Network traffic Embedded system Linux Printed Circuit Board (PCB) Cu(II) Zn(II) Fe(III) Ni(II) MC-Xs Cyanex 272 Blood pressure Silent killer Electrocardiography (ECG) sensor Pulse sensor Embedded system Embedded Network Security System (ENSS) Single Board Computer (SBC) Network security Sugarcane bagasse Rice straw Carbon Agricultural waste Heavy metal ions removal Antenna Fractal planar inverted F antenna (F-PIFA) Wireless communication system Mobile application T-joint Flux density Power loss Transformer 100kVA Distribution Transformer Free Space Optic (FSO) Telecommunication Weather Attenuation Mobile robot Neural network Vision system Optical code Optical Code Division Multiple Access (OCDMA) Multiple access interference (MAI) Optical networks Mobile communication networks Random Diagonal (RD) code Embedded system technology Embedded system vision Single Board Computer (SBC) Traffic surveillance video Virtual architectural walkthrough Windows Linux Operating systems Virtual reality Paddy field irrigation -- Perlis Solar powered water pump Photovoltaic (PV) Solar radiation Paddy production Agricultural Rice production Hargreaves Rice straw Pyrolysis proses Catalytic pyrolysis Bio-oil Agricultural wastes Biomass Plasma Plasma arc cutting Modern industry Advanced machining Composites Low density polyethylene (LDPE) Acrylonitrile butadiene styrene (ABS) Water hyacinth fibers (WHF) LDPE/ABS/WHF composites Polyethylene (PE) Waste printed circuit boards (PCBs) Recovery metals Environmental issues Recyclable material Chitosan Chitosan biocomposites Recycled polyethylene (RPE) Biocomposites Polymer Plastic Polyurethane foam Waste paper Foam composites Waste paper foam composites Old newspaper (ONP) Triethylene diamine (TEDA Anodic aluminium oxide (AAO) film Anodising process Electronic Eggshell powder Polymer composites Low density polyethylene (LDPE) LDPE/ABS/ESP Polyethylene (PE) Acrylonitrile butadiene styrene (ABS) Composites NaOH treatment Tert-butyl perbenzoate Bagasse fiber composites Sugarcane bagasse Polyester composites Natural fiber Aluminium Recycled aluminium alloy cylinder head Alluminium alloys A319 alloy Heat treatment Refuse-derived plastic Expanded Polystyrene (EPS) Used deep-fried oil (UDFO) Plastic Waste materials Polystyrene Washing process Mechanical washing principle Cloth cleaning Hydrodynamic Water jet Varistor ZnO Bahan seramik Pengisaran Natural rubber latex Latex Prevulcanized natural rubber latex films Dipping process Latex manufacturing Polyester composites Palm kernel shell (PKS) Unsaturated polyester (UP) Polymer composites Composite materials Manufacturing industry Geopolymers Inorganic polymers Mineral polymers Fly ash Geopolymerization process Alkaline activator Alloy Biomaterial Hydroxyapatite (HAP) Natural materials Corrosion Chitosan Sensor Sensing materials Chitosan thin films Coconut shell Polymer composites ABS/EPDM composites Composite materials Embedded operating system Face recognition systems Linux kernel Special-purpose computer system Compiler system Operating system Eggshells powder (ESP) Polymer composites Eggshells powder filled low density polyethylene (LDPE/ESP) Polyethylene composites Heat treatment Alluminium alloys piston Piston Aluminium Concentric pipes heat exchanger Heat exchanger Numerical investigation Finite element method Consonant-Vowel (CV) Vowel recognition Automatic Speech Recognition (ASR) Linear Discriminat Analysis (LDA) Robustness analysis Malays vowel analysis Wireless application Demodulator Mobile communication devices Communication technology Signal generator Radio transceiver Ion Sensitive Field Effect Transistor (ISFET) Potential Hydrogen (pH) pH sensitivity CMOS ISFET Simulation CMOS technology CMOS Transistor Silicon substrate Microfluidic FET Microelectronics Field effect transistor (FET) Nanogap biosensor Nanotechnology Protein detection Deoxyribonucleic acid (DNA) Tuberkulosis (TB) Kesihatan Mycobacterium Tuberkulosis Kahak Ziehl-Neelsen (ZN) Sistem Diagnosis Pintar Leaching system Gold leaching process Gold scraps Ascorbic acid Blood pressure Silent killer Systolic blood pressure (SBP) Health care Antenna technology Mobile communication Wireless application Fractal planar inverted F antenna (F-PIFA) Fructose palmitate (sugar ester) Enzymatic esterification Palmitic acid Cassava starch Bioethanol production Manihot esculenta Glucose Pressurized hot water extraction (PHWE) Diplazium esculentum Herbal medicines Antioxidant activity Microcontroller-based inverter Photovoltaic systems Switching pulse Electricity AC induction motor Rotor bar material Induction motor rotor slot Multiplier Modified Booth Multiplier (MBM) Modified Booth Encoding (MBE) Computer architecture EMG signals Biceps brachii muscle MATLAB-based system Human anatomy Agro-based products Taste sensing system (TSS) Graphical user interface (GUI) Low density polyethylene (LDPE) Natural rubber (NR) Fillers Silica composite Corn starch Coconut husk Glucose oxidase (GOx) Aspergillus niger Penicllium sp. GOx-producing strain Aspergillus terreus UniMAP AA-1 Ultrasonic sensors Aspergillus niger Microorganism activity Computer-Aided Design (CAD) Permittivity Measurement System (PMS) Nanogap capacitor Total Harmonic Distortation (THD) Molecularly imprinted polymer (MIP) Turmeric Curcuma longa Curcumin purification Chitosan filled polypropylene (PP) Chitosan Acrylic acid Sodium dodecyl sulfate (SDS) Speech dysfluencies Speech Communication Productivity calculation Assembly line Balancing Optimization Tingkah Laku Kognitif Standard [CBT(S)] Tingkah Laku Kognitif Brief [CBT(B)] Estim kendiri (EK) Lokus kawalan (LK) Penagih dadah Cement composite Coconut fibre Compressive strength Crack propagation Sabut kelapa Materials engineering TCP-Friendly Rate Control (TFRC) Transmission control protocol Transport Control Protocol (TCP) Real-time data transmission Network engineering Unmanned Aerial Vehicle (UAV) Flight Control Board (FCB) Quadrotor PID controller Attitude control PID controllers Mobile Autonomous Robot (MAR) Control systems implementations Intelligent autonomous mobile robot Wheeled mobile robot Cascade control system 3D Pattern Recognition Intelligent manipulator 3D Hand Replication Human Computer Interaction Morphology Machining process Machine tools Machining mode Optimization Cost effectiveness Maximum productivity Wind turbine design Electrical energy Vertical Axis Wind Turbine Electricity Mechanical energy Impeller wind turbine Thin films BST thin films Sol-gel technique Barium strontium titanate (BST) FeFET Applications Vehicle Noise Comfort Index (VNCI) Interior noise comfort Artificial neural network Car interior noise Automobiles -- Component and parts Noise control Automobiles -- Interior acoustic Code length Multiple access interference (MAI) Optical Code Division Multiple Access (OCDMA) OCDMA system Wireless communication systems Optical network Optical Code Division Multiple Access (OCDMA) Spectral amplitude coding (SAC) Optical networks Mobile communication networks Optical code Zero cross correlation Optical fiber communication Video compression Video encoding Motion estimation (ME) Fast search algorithms Video data transferring Hazian, Mamat Mohd Nazry Salleh Jefri Effendi Mohd Salih Kartigayan Muthukaruppan Khairul Fauzi Karim Lee, Weng Fook Nur Hidayah Ahmad Zaidi Syed Zulkarnain Syed Idrus Mohammad Nuzaihan Md Nor Muhammad Iqbal Muhammad Hussain Chai, Tong Yuen Fetra, Venny Riza Hadipramana, Josef Marni Azira, Markom Muhammad Nubli, Zulkifli Normah, Cheman Siti Rohana, Ahmad Sutikno Wan Muhamad Azmi, Mamat Zaridah, Mat Zain Che Padzilah, Yaacob Gomesh Nair, Shasidharan Hariharan, Muthusamy Hema Chengalvarayan, Radhakrishnamurthy Khairulnizam, Othman Mazlee, Mohd Noor Md. Mostafijur, Rahman Md. Sohrab, Hossain Muhamad Khairul, Ali Hassan Nasim, Ahmed Nor Harlina, Haji Hassan Saidatul Norlyana, Azemi Shuhaimi, Zakaria@Abdullah Abdul Rahman, Kram Fadzilah, Hashim Hilal Adnan, Fadhil Nur Farhan, Kahar Thubaasini, Prabhakaran Noor Syafawati, Ahmad Razi, Ahmad Masita, Raja Mohammad Ahmed Saleem, Oleiwi Al-Khuzaie Aimi Noorliyana, Hashim Azieyanti Nurain, Azmin Dahlia, Zakaria Juyana, A.Wahab Mohammed Jasim, Mohammed Al-Jumaili Muhammad Salihin, Zakaria Murizam, Darus Noor Aishatun, Majid Heap, Yee Nean Noor Azira, Mohd Noor Noor Marlyna, Ismail Nor Mazlina, Abdul Wahab Omar, Abdul Kareem Rohaya, Abdul Malek Roshida, Mustaffa Siti Noorkhartina, Ishak Shuhaizar, Daud Siti Shuhadah, Md Saleh Mohd Fizam, Hj. Zainon Saqab, S. Jarallah Shahrul Azmi, Mohd Yusof Arjuna, Marzuki Chin, Seng Fatt Maizatul, Zolkapli Norbi Hayati, Mohd Noor Aida Sharmila Wati, Wahab Sharizan, Ibrahim Muhamad Khairul, Ali Hassan Saidatul Norlyana, Azemi Azalina, Mohamed Nasir Noorulnajwa Diyana, Yaacob Nur Azirah, Jamial Sharulnizam, Mohd Mukhtar Syatirah, Mohd Noor Razaidi, Hussin Chong, Yee Lin Abdul Hallis, Abdul Aziz Abdulbaset, Mohamed Erfieda Ahmad Anas, Nagoor Gunny Aini Salwa, Hasan Nudin Azizullah, Saifullah Emi Shaqiza, Azizi Faisal Amri, Tanjung Lim, Sin Chee Abdul Rahman, Riza Huzili, Hussin Alida, Abdullah Mohamad Izril, Ishak Zul Azfar, Ahmam Mohd Saifizi, Saidon Abadal-Salam Taha, Hussain Aead, M. Ahmed Ahmed Younus, Qasim Ala’eddin, Ahmad Jaber Saif Allan Melvin, Andrew Amir Razif Arief, Jamil Abdullah Anuar, Mat Safar Arief Affendi, Juri The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor |
| description |
Metal-Oxide-Semiconductor field effect transistor (MOSFET) forms the basis in most
of electronic applications. In certain part of electronic circuitry, there is a requirement to use depletion mode of MOSFET which delivers current at Vg=0V. This type of
transistor is normally on unless reverse-polarity Vg is applied to turn it off. In this research, thorough investigations on process parameters that affect the performance of depletion mode transistor have been studied. The study was emphasized on the ion implantation to forms the depletion channel. It is a very crucial process step in creating a successful depletion type MOSFET. To support the study, Design of Experiment (DOE) for ion implantation dose and energy has been implemented in MIMOS fabrication facility. The 0.5um CMOS process technology was used as a baseline to produce n-type depletion mode MOSFET. Besides running the experiment, simulation software (ATHENA and ATLAS) were used in this study to reduce the cost and time of producing experiment wafers. Comparison of experiment test results and simulation output was also discussed in details in this thesis. On the other hand, problems and observations from the experiment were highlighted and discussed too. One of the main issues is on the two-peak point of transconductance curve. According to the experimental results, it can found that phosphorus ion with dose 3.3e12 cm-2 and energy 60 keV used in depletion channel implant should produce good characteristics of depletion mode MOSFET with threshold voltage -0.7 V. |
| format |
Thesis |
| author |
Hazian, Mamat Mohd Nazry Salleh Jefri Effendi Mohd Salih Kartigayan Muthukaruppan Khairul Fauzi Karim Lee, Weng Fook Nur Hidayah Ahmad Zaidi Syed Zulkarnain Syed Idrus Mohammad Nuzaihan Md Nor Muhammad Iqbal Muhammad Hussain Chai, Tong Yuen Fetra, Venny Riza Hadipramana, Josef Marni Azira, Markom Muhammad Nubli, Zulkifli Normah, Cheman Siti Rohana, Ahmad Sutikno Wan Muhamad Azmi, Mamat Zaridah, Mat Zain Che Padzilah, Yaacob Gomesh Nair, Shasidharan Hariharan, Muthusamy Hema Chengalvarayan, Radhakrishnamurthy Khairulnizam, Othman Mazlee, Mohd Noor Md. Mostafijur, Rahman Md. Sohrab, Hossain Muhamad Khairul, Ali Hassan Nasim, Ahmed Nor Harlina, Haji Hassan Saidatul Norlyana, Azemi Shuhaimi, Zakaria@Abdullah Abdul Rahman, Kram Fadzilah, Hashim Hilal Adnan, Fadhil Nur Farhan, Kahar Thubaasini, Prabhakaran Noor Syafawati, Ahmad Razi, Ahmad Masita, Raja Mohammad Ahmed Saleem, Oleiwi Al-Khuzaie Aimi Noorliyana, Hashim Azieyanti Nurain, Azmin Dahlia, Zakaria Juyana, A.Wahab Mohammed Jasim, Mohammed Al-Jumaili Muhammad Salihin, Zakaria Murizam, Darus Noor Aishatun, Majid Heap, Yee Nean Noor Azira, Mohd Noor Noor Marlyna, Ismail Nor Mazlina, Abdul Wahab Omar, Abdul Kareem Rohaya, Abdul Malek Roshida, Mustaffa Siti Noorkhartina, Ishak Shuhaizar, Daud Siti Shuhadah, Md Saleh Mohd Fizam, Hj. Zainon Saqab, S. Jarallah Shahrul Azmi, Mohd Yusof Arjuna, Marzuki Chin, Seng Fatt Maizatul, Zolkapli Norbi Hayati, Mohd Noor Aida Sharmila Wati, Wahab Sharizan, Ibrahim Muhamad Khairul, Ali Hassan Saidatul Norlyana, Azemi Azalina, Mohamed Nasir Noorulnajwa Diyana, Yaacob Nur Azirah, Jamial Sharulnizam, Mohd Mukhtar Syatirah, Mohd Noor Razaidi, Hussin Chong, Yee Lin Abdul Hallis, Abdul Aziz Abdulbaset, Mohamed Erfieda Ahmad Anas, Nagoor Gunny Aini Salwa, Hasan Nudin Azizullah, Saifullah Emi Shaqiza, Azizi Faisal Amri, Tanjung Lim, Sin Chee Abdul Rahman, Riza Huzili, Hussin Alida, Abdullah Mohamad Izril, Ishak Zul Azfar, Ahmam Mohd Saifizi, Saidon Abadal-Salam Taha, Hussain Aead, M. Ahmed Ahmed Younus, Qasim Ala’eddin, Ahmad Jaber Saif Allan Melvin, Andrew Amir Razif Arief, Jamil Abdullah Anuar, Mat Safar Arief Affendi, Juri |
| author_facet |
Hazian, Mamat Mohd Nazry Salleh Jefri Effendi Mohd Salih Kartigayan Muthukaruppan Khairul Fauzi Karim Lee, Weng Fook Nur Hidayah Ahmad Zaidi Syed Zulkarnain Syed Idrus Mohammad Nuzaihan Md Nor Muhammad Iqbal Muhammad Hussain Chai, Tong Yuen Fetra, Venny Riza Hadipramana, Josef Marni Azira, Markom Muhammad Nubli, Zulkifli Normah, Cheman Siti Rohana, Ahmad Sutikno Wan Muhamad Azmi, Mamat Zaridah, Mat Zain Che Padzilah, Yaacob Gomesh Nair, Shasidharan Hariharan, Muthusamy Hema Chengalvarayan, Radhakrishnamurthy Khairulnizam, Othman Mazlee, Mohd Noor Md. Mostafijur, Rahman Md. Sohrab, Hossain Muhamad Khairul, Ali Hassan Nasim, Ahmed Nor Harlina, Haji Hassan Saidatul Norlyana, Azemi Shuhaimi, Zakaria@Abdullah Abdul Rahman, Kram Fadzilah, Hashim Hilal Adnan, Fadhil Nur Farhan, Kahar Thubaasini, Prabhakaran Noor Syafawati, Ahmad Razi, Ahmad Masita, Raja Mohammad Ahmed Saleem, Oleiwi Al-Khuzaie Aimi Noorliyana, Hashim Azieyanti Nurain, Azmin Dahlia, Zakaria Juyana, A.Wahab Mohammed Jasim, Mohammed Al-Jumaili Muhammad Salihin, Zakaria Murizam, Darus Noor Aishatun, Majid Heap, Yee Nean Noor Azira, Mohd Noor Noor Marlyna, Ismail Nor Mazlina, Abdul Wahab Omar, Abdul Kareem Rohaya, Abdul Malek Roshida, Mustaffa Siti Noorkhartina, Ishak Shuhaizar, Daud Siti Shuhadah, Md Saleh Mohd Fizam, Hj. Zainon Saqab, S. Jarallah Shahrul Azmi, Mohd Yusof Arjuna, Marzuki Chin, Seng Fatt Maizatul, Zolkapli Norbi Hayati, Mohd Noor Aida Sharmila Wati, Wahab Sharizan, Ibrahim Muhamad Khairul, Ali Hassan Saidatul Norlyana, Azemi Azalina, Mohamed Nasir Noorulnajwa Diyana, Yaacob Nur Azirah, Jamial Sharulnizam, Mohd Mukhtar Syatirah, Mohd Noor Razaidi, Hussin Chong, Yee Lin Abdul Hallis, Abdul Aziz Abdulbaset, Mohamed Erfieda Ahmad Anas, Nagoor Gunny Aini Salwa, Hasan Nudin Azizullah, Saifullah Emi Shaqiza, Azizi Faisal Amri, Tanjung Lim, Sin Chee Abdul Rahman, Riza Huzili, Hussin Alida, Abdullah Mohamad Izril, Ishak Zul Azfar, Ahmam Mohd Saifizi, Saidon Abadal-Salam Taha, Hussain Aead, M. Ahmed Ahmed Younus, Qasim Ala’eddin, Ahmad Jaber Saif Allan Melvin, Andrew Amir Razif Arief, Jamil Abdullah Anuar, Mat Safar Arief Affendi, Juri |
| author_sort |
Hazian, Mamat |
| title |
The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor |
| title_short |
The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor |
| title_full |
The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor |
| title_fullStr |
The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor |
| title_full_unstemmed |
The effect of Phosphorous implant in converting the Enhancement Mode Transistor into Depletion Mode Transistor |
| title_sort |
effect of phosphorous implant in converting the enhancement mode transistor into depletion mode transistor |
| granting_institution |
Universiti Malaysia Perlis |
| granting_department |
School of Microelectronic Engineering |
| url |
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