Design and fabrication of quantum dot single electron transistors using scanning electron microscopy-based electron-beam nanolithogrphy

Quantum dot single-electron transistor (QD SET) is a nanoscale device operated at very low temperature. To fabricate QD SET operated at room temperature, QD must be fabricated in diameter of 10 nm. QD SET promises very small integrated circuits with ultralow-power consumption. In this research, a QD...

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Bibliographic Details
Main Author: Sutikno
Format: Thesis
Language:English
Subjects:
Online Access:http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/22189/1/Page%201-24.pdf
http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/22189/2/Full%20Text.pdf
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