Design and fabrication of n-isfet using SI₃N₄/SIO₂ structure for pH measurement
The design and fabrication of n-ISFET using Si₃N₄/SiO₂ structure for pH measurement has been carried out. In general Ion Sensitive Field Effect Transistor (ISFET) is a potentiometric pH sensor which widely used in chemical, biochemical and biomedical applications due to its advantages such as small...
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| Format: | Thesis |
| Language: | English |
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| Online Access: | http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/32470/1/Page%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/32470/2/Full%20text.pdf |
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