Design and fabrication of n-isfet using SI₃N₄/SIO₂ structure for pH measurement

Design and fabrication of n-isfet using SI₃N₄/SIO₂ structure for pH measurement

The design and fabrication of n-ISFET using Si₃N₄/SiO₂ structure for pH measurement has been carried out. In general Ion Sensitive Field Effect Transistor (ISFET) is a potentiometric pH sensor which widely used in chemical, biochemical and biomedical applications due to its advantages such as small...

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书目详细资料
主要作者:	Nur Syuhada, Md. Desa
格式:	Thesis
语言:	English
主题:	pH sensor Ion Sensitive Field Effect Transistor (ISFET) Silicon Thin films ISFET device pH detection
在线阅读:	http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/32470/1/Page%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/32470/2/Full%20text.pdf
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