Design and fabrication of n-isfet using SI₃N₄/SIO₂ structure for pH measurement
The design and fabrication of n-ISFET using Si₃N₄/SiO₂ structure for pH measurement has been carried out. In general Ion Sensitive Field Effect Transistor (ISFET) is a potentiometric pH sensor which widely used in chemical, biochemical and biomedical applications due to its advantages such as small...
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المؤلف الرئيسي: | Nur Syuhada, Md. Desa |
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التنسيق: | أطروحة |
اللغة: | English |
الموضوعات: | |
الوصول للمادة أونلاين: | http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/32470/1/Page%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/32470/2/Full%20text.pdf |
الوسوم: |
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