Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization

Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization

This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, the SiNWs sensor is designed via Elphy Quantum GDS II Editor and AutoCAD. A to...

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书目详细资料
主要作者:	Siti Fatimah, Abd Rahman
格式:	Thesis
语言:	English
主题:	Silicon Nanowires Nanotechnology Nanowires > Design and construction Silicon nanowires (SiNWs)
在线阅读:	http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33136/1/Page%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33136/2/Full%20text.pdf
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