Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization

This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, the SiNWs sensor is designed via Elphy Quantum GDS II Editor and AutoCAD. A to...

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Bibliographic Details
Main Author: Siti Fatimah, Abd Rahman
Format: Thesis
Language:English
Subjects:
Online Access:http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33136/1/Page%201-24.pdf
http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33136/2/Full%20text.pdf
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