Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication
Single-electron transistor (SET) is one of the promising nanotechnologies and distinguished by a very small device size and low power dissipation. This project explains the SET mask design, SET process flow development, and SET process and device simulation. The SET mask design consists of four l...
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my-unimap-63459 |
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uketd_dc |
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my-unimap-634592019-11-29T07:34:53Z Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication Amiza, Rasmi Uda Hashim, Assoc. Prof. Dr. Single-electron transistor (SET) is one of the promising nanotechnologies and distinguished by a very small device size and low power dissipation. This project explains the SET mask design, SET process flow development, and SET process and device simulation. The SET mask design consists of four level masks namely source and drain mask, polysilicon gate mask, contact mask, and metal mask. These masks were designed in nanometer (10-9 m) size using ELPHY Quantum GDS II Editor Software. The source and drain mask is connected by a nanowire placed between source and drain regions. The nanowire is designed with dimension of approximately 100 nm long and 10 nm wide. The process flow which includes the detailed parameters is developed for SET process and device simulation. This process flow consists of ten process modules include wafer cleaning process, material deposition, source/drain and nanowire formation , thermal oxidation, polysilicon deposition, polysilicon gate formation, source/drain implantation, contact formation, metal deposition and formation, and finally annealing and alloying process. The Synopsys TCAD simulation tools are utilized in SET process and device simulation work. The process and device simulation result shows that the single-electron transistor design with a 100 nm length and 10 nm width of the nanowire is working at room temperature (300 K) operation with a capacitance 0.4297 x 10-18F and a charging energy 186.4 meV. Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) 2006-04 Thesis en http://dspace.unimap.edu.my:80/xmlui/handle/123456789/63459 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/63459/1/Page%201-24.pdf 7b62059351cca546224561efe8983f02 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/63459/2/Full%20text.pdf 91b7e6e83a55528811dd5c5dbdb8e600 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/63459/3/license.txt 8a4605be74aa9ea9d79846c1fba20a33 Sol Single-Electron Transistor (SET) Single-electron transistor (SET) Solid state electronic Silicon-on-insulator technology Single-Electron technology Semiconductor devices School of Microelectronic Engineering |
| institution |
Universiti Malaysia Perlis |
| collection |
UniMAP Institutional Repository |
| language |
English English English English English English other English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English Malay English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English |
| advisor |
Uda Hashim, Assoc. Prof. Dr. Salmah Husseinsyah, Dr. Ir. Assoc. Prof. Dr. Mohd Rizon Mohd Juhari Dr. Haziah Abdul Hamid Uda Hashim, Assoc. Prof. Dr. Assoc. Prof. Dr. Kenneth Sundaraj Prof. Madya Dr. Khairul Nizar Ismail Sazali Yaacob, Prof. Dr. Uda Hashim, Prof. Madya Dr. Assoc. Prof. Dr. Puteh Saad Hakimah Osman, Dr. Shamsul Bahrin Jamaluddin, Prof. Madya Dr. Prof. Dr. Shamsul Baharin Jamaludin Prof. Dr. Zul Azhar Zahid Jamal Muhammad Irwanto Misrun, Dr. Assoc. Prof. Dr. Zaliman Sauli Mohd Fareq, Abd Malek, Dr. Abd. Razak, Shaari, Prof. Dr. Ibni Hajar, Rukumuddin, Prof. Ir. Dr. Arbain, Dachyar, Assoc. Prof. Dr. Mohd Noor, Ahmad, Prof. Mohd Shukri, Abdul Majid, Assoc. Ir. Dr. Mohd Fareq, Abd Malek, Dr. Abdullah, Osman, Dr. R. Badlishah, Ahmad, Prof. Dr. Abd Hamid, Adom, Prof Dr. Muhammad Irwanto, Misrun, Dr. Ong Hui Lin, Dr. Teh Pei Leng, Dr. Shamsul Baharin, Jamaludin, Prof. Dr. Kamarudin, Hussin, Datuk Prof. Dr. Mohd Abdur, Rashid, Assoc. Prof. Dr. Mohd Fareq, Abd Malek, Dr. Kenneth, Sundaraj, Assoc. Prof. Dr. Zuradzman, Mohamad Razlan, Dr. Shariman, Abu Bakar, Dr. Siti Norbahiyah, Mohamad Badari Nur Maizatul Shima, Adzali, Dr. Fahmi, Muhammad Ridwan, Assoc. Prof. Dr. Muhamad, Saifuldin, Dr. Rosnazri, Ali, Ir. Dr. Razi, Ahmad Muhammad Safizal, Abdullah Ahmad Nabil, Mohd Khalil Lim Bee Ying, Dr. Md. Mijanur, Rahman, Dr. Latifah Munirah, Kamarudin, Dr. Mohd Faridun, Dr. Rozmie Razif, Othman, Dr. Mazlee, Mohd Noor, Dr. Muzamir, Isa, Assoc. Prof. Dr. Samila, Mat Zali, Dr. Mazlee, Mohd Noor, Dr. Shahrul Nizam, Yaakob, Assoc. Prof. Dr. Lim Bee Ying, Dr. Mukhzeer, Mohamad Shahimin, Dr. Azmi, Rahmat, Prof. Dr. Muataz Hameed Salih, Al Doori, Dr. Mohd Sobri, Idris, Dr. Aimi Noorliyana, Hashim Mohd Faizal, Jamlos, Assoc. Prof. Dr. Irwana Nainggolan, Dr, Shamsul Baharin, Jamaludin, Prof. Dr. Mohd Irwan, Yusoff,Dr. Mohd Sobri, Idris, Dr. Rozmie Razif, Othman, Dr. Asral, Bahari Jambek, Dr. Nurul Izza, Mohd Nor, Dr. Rosmaini, Ahmad, Dr. Nurul Izza, Mohd Nor, Dr. Mukhzeer, Mohamad Shahimin, Dr. Mohd Irfan Hatim, Mohamas Dzahir, Dr. Ryspek, Usubamatov, Prof. Dr. Yarub, Al-Douri, Assoc. Prof. Dr. Sohiful Anuar, Zainol Murad, Dr. Ruzelita, Ngadiran, Dr. Rosnazri, Ali, Ir. Dr. Zaliman, Sauli, Prof. Dr. Sabira, Khatun, Prof. Dr. Muhammad Iqbal, Hussein, Dr. Mohd Faizal, Jamlos, Assoc. Prof. Dr. Mohd Faizal, Jamlos, Assoc. Prof. Dr. Azlin Fazlina, Osman, Dr. Mohammad Faridun Naim, Tajuddin, Dr. Zainor Ridzuan, Yahya. Dr. R. Badlishah, Ahmad, Prof. Dr. Nasim, Ahmed, Dr. Saidatul Norlyana, Azemi, Dr. R. Badlishah, Ahmad, Prof. Dr. Yeoh, Cheow Keat, Dr. Zarina, Zakaria, Dr. Nik Noriman, Zulkepli, Dr. Mohd Noor, Ahmad, Prof. Dr. Siti Khadijah, Za'aba, Dr. Dina Maizana, Dr. Ir. Nik Noriman, Zulkepli, Dr. R. Badlishah, Ahmad, Prof. Dr. Rozmie Razif, Othman, Dr. Uda, Hashim, Prof. Dr. Du Ngoc, Uy Lan, Dr. Ali Yeon, Md. Shakaff, Prof. Dr. |
| topic |
Sol Single-Electron Transistor (SET) Single-electron transistor (SET) Solid state electronic Silicon-on-insulator technology Single-Electron technology Semiconductor devices Polymers Biodegradable products Polyurethanes Waste paper Waste products Object detection Image processing Filter Circular Hough Transform (CHT) Capacitor Power system Capacitor banks Sol Single-Electron Transistor (SET) Silicon nitride Electric insulators and insulation -- Thin films Thin films Sub nano devices Ultra thin silicon dioxide MiroSot Image processing Optical data processing Sol Single-Electron Transistor (SET) Optical pattern recognition Computer vision Robot vision Artificial vision Land use -- Environmental aspects -- Malaysia Bangunan Hijau Pembangunan hartanah Pemaju Kelestarian Modified Retinex Normalization (MRT) Infant analysis Infant psychiatry Infant face recognition Face recognition Agricultural wastes Carbon Adsorbent Chromium Heavy metal removal Semiconductor Microlitoghraphy Alignment ASML Scanner Alignment System Alignment process Neural networks (Computer science) Cognition in animals Object recognition Moment invariant Microcrystalline cellulose (MCC) Rubbers Filler Microcrystalline polymers Corrosion and anti corrosives Composites Corrosion Corrosion behaviour Biomedical materials Alloys Sol Single-Electron Transistor (SET) Biomaterials Marketing Pharmaceutical industry Marketing mix strategy (MMS) Pharmaceutical industry -- Yemen Ball grid array (BGA) Ball grid array technology Finite element analysis (FEA) Reliability H-Bridge Cascaded Fuel cells Inverter Multilevel Inverter Topologies Light emitting diodes High power LED Lighting industry Wireless communication Neurophysiological Body-centric Wireless Communication (BCWC) Misai kucing Orthosiphon stamineus Herbal plant Traditional medicine Citronella oil Steam distillation Essential oil Cymbopogan winterianus Glass fibre reinforced epoxy (GRE) Composites Composite tubes Ultra-wideband antennas Wireless systems Ultra-wideband (UWB) Consumer satisfaction Service quality Public hospital -- Jordan Radio resource management (Wireless communications) Wireless connections LTE WiMAX Broadband wireless connections Mobile robots Robotics Agricultural applications Mobile robots -- Design and construction Titanium dioxide Photovoltaic power generation Titanium dioxide (TiO2) Dye-sensitized solar cells (DSSC) Solar cell Composite materials Modified silica (SiO2) Polypropylene (PP) Nanocomposites Polymers Rubber Latex Polymeric composites Epoxy resins Polymer blends Biomedical materials Magnesium Mg-Zn powders Powder metallurgy Biocomposite materials Inorganic Compounds Industrialized Building Palm oil boiler ash (POBA) Palm oil waste Geopolymer Inorganic polymers Optoelectronic device Quantum dot Optoelectronic devices Auscultation Respiratory Internal sounds Computerized decision support system (CDSS) Electric vehicles -- Batteries Nanofluids Cooling Automobiles -- Air conditioning Automobiles -- Heating and ventilation Electric vehicle (EV) Magnesium alloys Corrosion resistant alloys Metals -- Anodic oxidation Anodizing Corrosion resistance Biocompatibility Biomedical materials Microwave heating Sinter (Metallurgy) Bioceramics Water -- Purification -- Ozonization Water -- Purification -- Oxidation Ozonization Oxidation Azo dyes Dyes Bearings (Machinery) Transplanting machines Rice -- Planting -- Malaysia Transplanting (Plant culture) Integrated transplanter System of Rice Intensifications (SRI) Wind turbines Direct current amplifiers Sol Single-Electron Transistor (SET) PID controllers Renewable energy sources Catalysts Biomass Pyrolysis Waste eggshell Catalytic pyrolysis Voluntarism Young volunteers Youth Theory of planned behavior (TPB) Lubrication systems Lubrication and lubricants Machining Nanolubricants Composite Materials Palm kernel shell (PKS) Biocomposite films Biopolymers Wireless communication systems Beamforming Hybrid Cell Downlink Optimization (HCDO) Mobile robots Artificial intelligence -- Computer programs Robotics Large gas sensor array (LGSA) Photovoltaic power generation Photovoltaic cells Renewable energy sources Solar energy Renewable energy Computer software -- Testing Computational grids (Computer systems) Combinatorial analysis Software compatibility -- Testing Operations research -- Data Processing T-way strategy Combinatorial input interaction test (CIIT) Cement composites Sustainable construction Sustainable development Sustainable construction Electric inverters Computer algorithms Particle Swarm Optimization (PSO) Inverters Distributed generation of electric power Electric power systems DG Distributed generation (DG) Porous materials Clay Carbon nanotubes Nanostructured materials High resolution imaging Image processing -- Digital techniques Image processing -- Digital techniques -- Mathematics Image processing -- Mathematics Iterative Back Projection (IBP) Kapok Biopolymers Polyethylene Kapok husk (KH) Filler Linear low density polyethylene (LLDPE) Interferometers Integrated optics Biosensors Point-of-care testing Dengue Dengue Biosensor Cathodic protection Corrosion resistant alloys Magnesium alloys Alloys Aloi Magnesium (Mg) Anod korbanan Embedded computer systems Field programmable gate arrays Embedded system Solid oxide fuel cells Electrolytes Fuel cell Calcium carbonate Crystallography Precipitation (Chemistry) Precipitated Calcium Carbonate (PCC) Log-periodic antennas Antenna arrays Wireless communication systems Antennas (Electronics) Antennas Chitosan Chitin Graphite Volatile organic compounds Polyvinyl alcohol (PVA) Gas sensor Biomedical materials Magnesium Zinc Biomaterials Magnesium composites Photovoltaic power generation Solar energy Renewable energy sources Photovoltaic (PV) Fuel cells Transparent ceramics LaYO₃ Solid electrolyte Polycrystalline ceramics Computational grids (Computer systems) Combinatorial analysis Operations research -- Data Processing Computer software -- Testing Software compatibility -- Testing T-way strategy Evolutionary computation Computer algorithms Algorithms Evolutionary Algorithms (EAs) Multiobjective Optimization Problems (MOPs) Transdermal medication Drug delivery systems Microneedle Microneedle -- Design and construction Transdermal drug delivery (TDD) Lean manufacturing Waste minimization Single Minute Exchange of Dies (SMED) Microfluidics Microelectromechanical systems Genetic algorithms Micropumps Valveless micropumps Valveless micropumps -- Design and constructions Photosensitizing compounds Solar cells Dye-sensitized solar cells Photosensitizer dye-sensitized solar cells Quercetin Bioflavonoids Molecular imprinting Quercetin imprinted membranes (QIM) Vertical axis wind turbines Wind turbines Wind power Renewable energy Electrospinning Nanostructures Photovoltaic power generation Dengue Sol Single-Electron Transistor (SET) Broadband communication systems Complementary Metal Oxide Semiconductor (CMOS) Synthetic Aperture Radar (SAR) Digital images Noise Noise control Digital images -- Editing -- Computer programs Signal proccessing Denoising Power resources Photovoltaic power systems Solar Photovoltaic (PV) Battery Energy Storage System (BESS) Renewable Energy (RE) Cancer -- Imaging Microelectromechanical systems Breast -- Cancer Three-dimensional imaging Cancer Breast carcinoma Cognitive radio networks Wireless LANs Spectrum saturation Frequency spectrum Spectrum detection Flat panel displays Linear programming Flat panel displays -- Design and constructions Flat panel displays -- Production planning Beamforming Antennas (Electronics) Microelectromechanical systems Patch antenna Wireless communication system Long-Term Evolution (Telecommunications) Wireless LANs Antenna arrays Long Term Evolution (LTE) Wireless Local Area Network (WLAN) Thermoplastics Biodegradable plastics Starch Cold Storage Refrigerated foods Thermoplastic starch (TPS) Solar panel Converters SEPIC Buck Boost MPPT Voltage Current Power Controller Logic programming Neural networks (Computer science) Mean Field Theory (MFT) Inertial navigation systems Global Positioning System (GPS) Coordinate systems Inertial Navigation System (INS) Passive optical networks Optical fiber communication Optical communication Computer networks Communication -- Computer networks Optical Code Division Multiple Access (OCDMA) Coordinate Systems Three-dimensional imaging 3D Frequency Selective Surfaces Frequency Selective Surfaces (FSS) Long-Term Evolution (Telecommunications) Wireless communication systems Antennas LTE Dual downlink signal Cooling systems Heat -- Transmission Heat sinks (Electronics) Heat transfer Liquid coolant Proteins -- Synthesis Nanoparticles Broilers (Chickens) Slaughtering Protein extraction Slaughter Polybutadiene Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Rubber Thin film transistors Graphene Organic thin film transistor (OTFT) Thin film Dielectric wave guides Submillimeter waves Porous materials Waveguides THz Waveguides Plasma jets Atmospheric Pressure Plasma Jet (APPJ) Ionized gas Plasma Sol Single-Electron Transistor (SET) Rotors Electric machinery Induction motor -- Design and construction Polybutadiene Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Recycled acrylonitrile butadiene rubber (rNBR) Frequency division multiple access Orthogonal Frequency Division Multiplexing (OFDM) Communication networks Telecommuncation -- Traffic Computer networks Internetworking (Telecommunication) Network traffic engineering Acoustic surface wave devices Piezoelectricity Dengue Aedes Mosquitoes Sensor Epoxy resins Porous materials Foamed materials Shape memory foam Polymer foam Imprinted polymers Molecularly imprinted polymer (MIP) Polymers Molecularly imprinted polymer (MIP) -- Sensor Sensor |
| spellingShingle |
Sol Single-Electron Transistor (SET) Single-electron transistor (SET) Solid state electronic Silicon-on-insulator technology Single-Electron technology Semiconductor devices Polymers Biodegradable products Polyurethanes Waste paper Waste products Object detection Image processing Filter Circular Hough Transform (CHT) Capacitor Power system Capacitor banks Sol Single-Electron Transistor (SET) Silicon nitride Electric insulators and insulation -- Thin films Thin films Sub nano devices Ultra thin silicon dioxide MiroSot Image processing Optical data processing Sol Single-Electron Transistor (SET) Optical pattern recognition Computer vision Robot vision Artificial vision Land use -- Environmental aspects -- Malaysia Bangunan Hijau Pembangunan hartanah Pemaju Kelestarian Modified Retinex Normalization (MRT) Infant analysis Infant psychiatry Infant face recognition Face recognition Agricultural wastes Carbon Adsorbent Chromium Heavy metal removal Semiconductor Microlitoghraphy Alignment ASML Scanner Alignment System Alignment process Neural networks (Computer science) Cognition in animals Object recognition Moment invariant Microcrystalline cellulose (MCC) Rubbers Filler Microcrystalline polymers Corrosion and anti corrosives Composites Corrosion Corrosion behaviour Biomedical materials Alloys Sol Single-Electron Transistor (SET) Biomaterials Marketing Pharmaceutical industry Marketing mix strategy (MMS) Pharmaceutical industry -- Yemen Ball grid array (BGA) Ball grid array technology Finite element analysis (FEA) Reliability H-Bridge Cascaded Fuel cells Inverter Multilevel Inverter Topologies Light emitting diodes High power LED Lighting industry Wireless communication Neurophysiological Body-centric Wireless Communication (BCWC) Misai kucing Orthosiphon stamineus Herbal plant Traditional medicine Citronella oil Steam distillation Essential oil Cymbopogan winterianus Glass fibre reinforced epoxy (GRE) Composites Composite tubes Ultra-wideband antennas Wireless systems Ultra-wideband (UWB) Consumer satisfaction Service quality Public hospital -- Jordan Radio resource management (Wireless communications) Wireless connections LTE WiMAX Broadband wireless connections Mobile robots Robotics Agricultural applications Mobile robots -- Design and construction Titanium dioxide Photovoltaic power generation Titanium dioxide (TiO2) Dye-sensitized solar cells (DSSC) Solar cell Composite materials Modified silica (SiO2) Polypropylene (PP) Nanocomposites Polymers Rubber Latex Polymeric composites Epoxy resins Polymer blends Biomedical materials Magnesium Mg-Zn powders Powder metallurgy Biocomposite materials Inorganic Compounds Industrialized Building Palm oil boiler ash (POBA) Palm oil waste Geopolymer Inorganic polymers Optoelectronic device Quantum dot Optoelectronic devices Auscultation Respiratory Internal sounds Computerized decision support system (CDSS) Electric vehicles -- Batteries Nanofluids Cooling Automobiles -- Air conditioning Automobiles -- Heating and ventilation Electric vehicle (EV) Magnesium alloys Corrosion resistant alloys Metals -- Anodic oxidation Anodizing Corrosion resistance Biocompatibility Biomedical materials Microwave heating Sinter (Metallurgy) Bioceramics Water -- Purification -- Ozonization Water -- Purification -- Oxidation Ozonization Oxidation Azo dyes Dyes Bearings (Machinery) Transplanting machines Rice -- Planting -- Malaysia Transplanting (Plant culture) Integrated transplanter System of Rice Intensifications (SRI) Wind turbines Direct current amplifiers Sol Single-Electron Transistor (SET) PID controllers Renewable energy sources Catalysts Biomass Pyrolysis Waste eggshell Catalytic pyrolysis Voluntarism Young volunteers Youth Theory of planned behavior (TPB) Lubrication systems Lubrication and lubricants Machining Nanolubricants Composite Materials Palm kernel shell (PKS) Biocomposite films Biopolymers Wireless communication systems Beamforming Hybrid Cell Downlink Optimization (HCDO) Mobile robots Artificial intelligence -- Computer programs Robotics Large gas sensor array (LGSA) Photovoltaic power generation Photovoltaic cells Renewable energy sources Solar energy Renewable energy Computer software -- Testing Computational grids (Computer systems) Combinatorial analysis Software compatibility -- Testing Operations research -- Data Processing T-way strategy Combinatorial input interaction test (CIIT) Cement composites Sustainable construction Sustainable development Sustainable construction Electric inverters Computer algorithms Particle Swarm Optimization (PSO) Inverters Distributed generation of electric power Electric power systems DG Distributed generation (DG) Porous materials Clay Carbon nanotubes Nanostructured materials High resolution imaging Image processing -- Digital techniques Image processing -- Digital techniques -- Mathematics Image processing -- Mathematics Iterative Back Projection (IBP) Kapok Biopolymers Polyethylene Kapok husk (KH) Filler Linear low density polyethylene (LLDPE) Interferometers Integrated optics Biosensors Point-of-care testing Dengue Dengue Biosensor Cathodic protection Corrosion resistant alloys Magnesium alloys Alloys Aloi Magnesium (Mg) Anod korbanan Embedded computer systems Field programmable gate arrays Embedded system Solid oxide fuel cells Electrolytes Fuel cell Calcium carbonate Crystallography Precipitation (Chemistry) Precipitated Calcium Carbonate (PCC) Log-periodic antennas Antenna arrays Wireless communication systems Antennas (Electronics) Antennas Chitosan Chitin Graphite Volatile organic compounds Polyvinyl alcohol (PVA) Gas sensor Biomedical materials Magnesium Zinc Biomaterials Magnesium composites Photovoltaic power generation Solar energy Renewable energy sources Photovoltaic (PV) Fuel cells Transparent ceramics LaYO₃ Solid electrolyte Polycrystalline ceramics Computational grids (Computer systems) Combinatorial analysis Operations research -- Data Processing Computer software -- Testing Software compatibility -- Testing T-way strategy Evolutionary computation Computer algorithms Algorithms Evolutionary Algorithms (EAs) Multiobjective Optimization Problems (MOPs) Transdermal medication Drug delivery systems Microneedle Microneedle -- Design and construction Transdermal drug delivery (TDD) Lean manufacturing Waste minimization Single Minute Exchange of Dies (SMED) Microfluidics Microelectromechanical systems Genetic algorithms Micropumps Valveless micropumps Valveless micropumps -- Design and constructions Photosensitizing compounds Solar cells Dye-sensitized solar cells Photosensitizer dye-sensitized solar cells Quercetin Bioflavonoids Molecular imprinting Quercetin imprinted membranes (QIM) Vertical axis wind turbines Wind turbines Wind power Renewable energy Electrospinning Nanostructures Photovoltaic power generation Dengue Sol Single-Electron Transistor (SET) Broadband communication systems Complementary Metal Oxide Semiconductor (CMOS) Synthetic Aperture Radar (SAR) Digital images Noise Noise control Digital images -- Editing -- Computer programs Signal proccessing Denoising Power resources Photovoltaic power systems Solar Photovoltaic (PV) Battery Energy Storage System (BESS) Renewable Energy (RE) Cancer -- Imaging Microelectromechanical systems Breast -- Cancer Three-dimensional imaging Cancer Breast carcinoma Cognitive radio networks Wireless LANs Spectrum saturation Frequency spectrum Spectrum detection Flat panel displays Linear programming Flat panel displays -- Design and constructions Flat panel displays -- Production planning Beamforming Antennas (Electronics) Microelectromechanical systems Patch antenna Wireless communication system Long-Term Evolution (Telecommunications) Wireless LANs Antenna arrays Long Term Evolution (LTE) Wireless Local Area Network (WLAN) Thermoplastics Biodegradable plastics Starch Cold Storage Refrigerated foods Thermoplastic starch (TPS) Solar panel Converters SEPIC Buck Boost MPPT Voltage Current Power Controller Logic programming Neural networks (Computer science) Mean Field Theory (MFT) Inertial navigation systems Global Positioning System (GPS) Coordinate systems Inertial Navigation System (INS) Passive optical networks Optical fiber communication Optical communication Computer networks Communication -- Computer networks Optical Code Division Multiple Access (OCDMA) Coordinate Systems Three-dimensional imaging 3D Frequency Selective Surfaces Frequency Selective Surfaces (FSS) Long-Term Evolution (Telecommunications) Wireless communication systems Antennas LTE Dual downlink signal Cooling systems Heat -- Transmission Heat sinks (Electronics) Heat transfer Liquid coolant Proteins -- Synthesis Nanoparticles Broilers (Chickens) Slaughtering Protein extraction Slaughter Polybutadiene Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Rubber Thin film transistors Graphene Organic thin film transistor (OTFT) Thin film Dielectric wave guides Submillimeter waves Porous materials Waveguides THz Waveguides Plasma jets Atmospheric Pressure Plasma Jet (APPJ) Ionized gas Plasma Sol Single-Electron Transistor (SET) Rotors Electric machinery Induction motor -- Design and construction Polybutadiene Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Sol Single-Electron Transistor (SET) Recycled acrylonitrile butadiene rubber (rNBR) Frequency division multiple access Orthogonal Frequency Division Multiplexing (OFDM) Communication networks Telecommuncation -- Traffic Computer networks Internetworking (Telecommunication) Network traffic engineering Acoustic surface wave devices Piezoelectricity Dengue Aedes Mosquitoes Sensor Epoxy resins Porous materials Foamed materials Shape memory foam Polymer foam Imprinted polymers Molecularly imprinted polymer (MIP) Polymers Molecularly imprinted polymer (MIP) -- Sensor Sensor Amiza, Rasmi Dahlia, Zakaria Haniza, Yazid Ismael Husein, Almabrouk Mohd Faiz Aizad, Abdul Fatah Mohd Nadhir, Ab Wahab Mohd Nazaruddin, Yusof @ Abdul Rahman Muhammad Naufal, Mansor Nor Harlina, Haji Hassan Normah, Ahmad Shahrul Nizam, Yaakob Siti Salwa, Mohammad Shirajuddin Zamri, Yusoff Zuraidawani, Che Daud Mohsen Ali, Ahmed Murshid Muhammad Nubli, Zulkifli Nurhafiza, Azizan Rajendran, Vairavan Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication |
| description |
Single-electron transistor (SET) is one of the promising nanotechnologies and
distinguished by a very small device size and low power dissipation. This project explains
the SET mask design, SET process flow development, and SET process and device
simulation. The SET mask design consists of four level masks namely source and drain
mask, polysilicon gate mask, contact mask, and metal mask. These masks were designed in
nanometer (10-9 m) size using ELPHY Quantum GDS II Editor Software. The source and
drain mask is connected by a nanowire placed between source and drain regions. The
nanowire is designed with dimension of approximately 100 nm long and 10 nm wide. The
process flow which includes the detailed parameters is developed for SET process and
device simulation. This process flow consists of ten process modules include wafer
cleaning process, material deposition, source/drain and nanowire formation , thermal
oxidation, polysilicon deposition, polysilicon gate formation, source/drain implantation,
contact formation, metal deposition and formation, and finally annealing and alloying
process. The Synopsys TCAD simulation tools are utilized in SET process and device
simulation work. The process and device simulation result shows that the single-electron
transistor design with a 100 nm length and 10 nm width of the nanowire is working at room
temperature (300 K) operation with a capacitance 0.4297 x 10-18F and a charging energy
186.4 meV. |
| format |
Thesis |
| author |
Amiza, Rasmi Dahlia, Zakaria Haniza, Yazid Ismael Husein, Almabrouk Mohd Faiz Aizad, Abdul Fatah Mohd Nadhir, Ab Wahab Mohd Nazaruddin, Yusof @ Abdul Rahman Muhammad Naufal, Mansor Nor Harlina, Haji Hassan Normah, Ahmad Shahrul Nizam, Yaakob Siti Salwa, Mohammad Shirajuddin Zamri, Yusoff Zuraidawani, Che Daud Mohsen Ali, Ahmed Murshid Muhammad Nubli, Zulkifli Nurhafiza, Azizan Rajendran, Vairavan |
| author_facet |
Amiza, Rasmi Dahlia, Zakaria Haniza, Yazid Ismael Husein, Almabrouk Mohd Faiz Aizad, Abdul Fatah Mohd Nadhir, Ab Wahab Mohd Nazaruddin, Yusof @ Abdul Rahman Muhammad Naufal, Mansor Nor Harlina, Haji Hassan Normah, Ahmad Shahrul Nizam, Yaakob Siti Salwa, Mohammad Shirajuddin Zamri, Yusoff Zuraidawani, Che Daud Mohsen Ali, Ahmed Murshid Muhammad Nubli, Zulkifli Nurhafiza, Azizan Rajendran, Vairavan |
| author_sort |
Amiza, Rasmi |
| title |
Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication |
| title_short |
Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication |
| title_full |
Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication |
| title_fullStr |
Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication |
| title_full_unstemmed |
Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication |
| title_sort |
design, simulation and process development for sol single-electron transistor (set) fabrication |
| granting_institution |
Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) |
| granting_department |
School of Microelectronic Engineering |
| url |
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