Interaction effect of rca dilution, temperature and megasonic on particle removal efficiency, gate oxide quality, defect density and yield
Tweaking RCA (Radio Corporation of America) cleaning process has been the choice of many manufacturers in order to meet the stringent requirement of ITRS (International Technology Roadmap for Semiconductor) as the involvement cost and cycle time is low. It is necessary to understand the interaction...
Saved in:
Main Author: | Chai, Jane Hai Sing |
---|---|
Format: | Thesis |
Language: | English |
Published: |
2009
|
Subjects: | |
Online Access: | http://ir.unimas.my/id/eprint/3152/1/Jane%20Chai%20Hai%20Sing%20ft.pdf |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Dynamical analysis of chemostat models incorporating variable yield coefficient and substrate inhibition with recycling process
by: Mohd Sadiq, Ummalaisha Farhana
Published: (2021) -
The influence of temperature and types of filter media on the palm oil mill effluent (POME) treatment using the hybrid up-flow anaerobic sludge blanket (HUASB) reactor
by: Habeeb, Sinan Abood
Published: (2012) -
The influence of temperature and types of filter media on the palm oil mill effluent (POME) treatment using the hybrid up-flow anaerobic sludge blanket (HUASB) reactor
by: Habeeb, Sinan Abood
Published: (2012) -
Synthesis and characterization of rare earth elements cerium and dysprosium doped low density bi-2223 superconductor / Robaiah Mamat
by: Mamat, Robaiah
Published: (2015) -
Acid impregnated honeydew rind activated carbon for chromium and zinc removal
by: Mat Ali@Yunus, Zalilah Murni
Published: (2017)