Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique
Metal-organic decomposed (MOD) Ce(h precursor has been spin coated on n-type Si and n-type GaN substrates with thickness in the range of 45-90 nm. Prapenanda Ce02 yang disediakan dengan teknik penguraian organik logam telah diserakkan ke atas wafer Si dan GaN beljenis n dengan ketebalan dalam Iin...
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my-usm-ep.289162017-05-15T08:05:02Z Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique 2010 Quah, Hock Jin TN1-997 Mining engineering. Metallurgy Metal-organic decomposed (MOD) Ce(h precursor has been spin coated on n-type Si and n-type GaN substrates with thickness in the range of 45-90 nm. Prapenanda Ce02 yang disediakan dengan teknik penguraian organik logam telah diserakkan ke atas wafer Si dan GaN beljenis n dengan ketebalan dalam Iinkungan 45-90 run. 2010 Thesis http://eprints.usm.my/28916/ http://eprints.usm.my/28916/1/INVESTIGATION_OF_METAL_ORGANIC_DECOMPOSED_MOD_CERIUM_OXIDE.pdf application/pdf en public masters Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral |
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Universiti Sains Malaysia |
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USM Institutional Repository |
language |
English |
topic |
TN1-997 Mining engineering Metallurgy |
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TN1-997 Mining engineering Metallurgy Quah, Hock Jin Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
description |
Metal-organic decomposed (MOD) Ce(h precursor has been spin coated on
n-type Si and n-type GaN substrates with thickness in the range of 45-90 nm. Prapenanda Ce02 yang disediakan dengan teknik penguraian organik logam
telah diserakkan ke atas wafer Si dan GaN beljenis n dengan ketebalan dalam
Iinkungan 45-90 run. |
format |
Thesis |
qualification_level |
Master's degree |
author |
Quah, Hock Jin |
author_facet |
Quah, Hock Jin |
author_sort |
Quah, Hock Jin |
title |
Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
title_short |
Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
title_full |
Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
title_fullStr |
Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
title_full_unstemmed |
Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
title_sort |
investigation of metal-organic decomposed (mod) cerium oxide (ceo2) gate deposited on silicon and gallium nitride substrates via spin-on coating technique |
granting_institution |
Universiti Sains Malaysia |
granting_department |
Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral |
publishDate |
2010 |
url |
http://eprints.usm.my/28916/1/INVESTIGATION_OF_METAL_ORGANIC_DECOMPOSED_MOD_CERIUM_OXIDE.pdf |
_version_ |
1747820040997044224 |