Inductively Coupled Plasma Etching On Gan
Dalam projek ini, penyelidikan difokuskan kepada kajian tentang pengaruh pelbagai campuran plasma (H2 dan Ar) kepada Ch sebagai gas asas pada GaN menggunakan punaran kering khususnya punaran plasma yang digandingkan secara teraruh (ICP) untuk mendapatkan anisotropik yang tinggi In this project...
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2010
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my-usm-ep.295162017-03-22T02:23:46Z Inductively Coupled Plasma Etching On Gan 2010-01 Rosli, Siti Azlina QC1 Physics (General) Dalam projek ini, penyelidikan difokuskan kepada kajian tentang pengaruh pelbagai campuran plasma (H2 dan Ar) kepada Ch sebagai gas asas pada GaN menggunakan punaran kering khususnya punaran plasma yang digandingkan secara teraruh (ICP) untuk mendapatkan anisotropik yang tinggi In this project, the research mainly focused on the investigation of the influence of the various plasma mixtures (H2 and Ar) in Ch-based on GaN using dry etching majoring in Inductively Coupled Plasma etching to obtain highly anisotropic 2010-01 Thesis http://eprints.usm.my/29516/ http://eprints.usm.my/29516/1/Inductively_coupled_plasma_etching_on_GaN.pdf application/pdf en public masters USM Pusat Pengajian Sains Fizik |
| institution |
Universiti Sains Malaysia |
| collection |
USM Institutional Repository |
| language |
English |
| topic |
QC1 Physics (General) |
| spellingShingle |
QC1 Physics (General) Rosli, Siti Azlina Inductively Coupled Plasma Etching On Gan |
| description |
Dalam projek ini, penyelidikan difokuskan kepada kajian tentang pengaruh
pelbagai campuran plasma (H2 dan Ar) kepada Ch sebagai gas asas pada GaN
menggunakan punaran kering khususnya punaran plasma yang digandingkan secara
teraruh (ICP) untuk mendapatkan anisotropik yang tinggi
In this project, the research mainly focused on the investigation of the
influence of the various plasma mixtures (H2 and Ar) in Ch-based on GaN using dry
etching majoring in Inductively Coupled Plasma etching to obtain highly anisotropic |
| format |
Thesis |
| qualification_level |
Master's degree |
| author |
Rosli, Siti Azlina |
| author_facet |
Rosli, Siti Azlina |
| author_sort |
Rosli, Siti Azlina |
| title |
Inductively Coupled Plasma Etching On Gan |
| title_short |
Inductively Coupled Plasma Etching On Gan |
| title_full |
Inductively Coupled Plasma Etching On Gan |
| title_fullStr |
Inductively Coupled Plasma Etching On Gan |
| title_full_unstemmed |
Inductively Coupled Plasma Etching On Gan |
| title_sort |
inductively coupled plasma etching on gan |
| granting_institution |
USM |
| granting_department |
Pusat Pengajian Sains Fizik |
| publishDate |
2010 |
| url |
http://eprints.usm.my/29516/1/Inductively_coupled_plasma_etching_on_GaN.pdf |
| _version_ |
1747820161886322688 |