Fabrication Of Two Dimensional Silicon Photonic Crystal

Photonic crystals are materials with a periodicity in refractive index. When electromagnetic waves with a wide range of frequencies propagate through these materials, certain range of frequencies is prohibited. The prohibited frequencies are known as photonic bandgap. In this study, a two dimensiona...

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Main Author:	Sin, Yew Keong
Format:	Thesis
Language:	English
Published:	2010
Subjects:	QC1 Physics (General)
Online Access:	http://eprints.usm.my/42664/1/SIN_YEW_KEONG.pdf
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id	my-usm-ep.42664
record_format	uketd_dc
spelling	my-usm-ep.426642019-04-12T05:26:57Z Fabrication Of Two Dimensional Silicon Photonic Crystal 2010-03 Sin, Yew Keong QC1 Physics (General) Photonic crystals are materials with a periodicity in refractive index. When electromagnetic waves with a wide range of frequencies propagate through these materials, certain range of frequencies is prohibited. The prohibited frequencies are known as photonic bandgap. In this study, a two dimensional silicon photonic crystal is fabricated by microfabrication method. Electron beam lithography and etching process are important processes in this method. Hence, preliminary works on optimization parameters in electron beam lithography are necessary. 2010-03 Thesis http://eprints.usm.my/42664/ http://eprints.usm.my/42664/1/SIN_YEW_KEONG.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Fizik
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	QC1 Physics (General)
spellingShingle	QC1 Physics (General) Sin, Yew Keong Fabrication Of Two Dimensional Silicon Photonic Crystal
description	Photonic crystals are materials with a periodicity in refractive index. When electromagnetic waves with a wide range of frequencies propagate through these materials, certain range of frequencies is prohibited. The prohibited frequencies are known as photonic bandgap. In this study, a two dimensional silicon photonic crystal is fabricated by microfabrication method. Electron beam lithography and etching process are important processes in this method. Hence, preliminary works on optimization parameters in electron beam lithography are necessary.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Sin, Yew Keong
author_facet	Sin, Yew Keong
author_sort	Sin, Yew Keong
title	Fabrication Of Two Dimensional Silicon Photonic Crystal
title_short	Fabrication Of Two Dimensional Silicon Photonic Crystal
title_full	Fabrication Of Two Dimensional Silicon Photonic Crystal
title_fullStr	Fabrication Of Two Dimensional Silicon Photonic Crystal
title_full_unstemmed	Fabrication Of Two Dimensional Silicon Photonic Crystal
title_sort	fabrication of two dimensional silicon photonic crystal
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Sains Fizik
publishDate	2010
url	http://eprints.usm.my/42664/1/SIN_YEW_KEONG.pdf
_version_	1747821089478672384

Fabrication Of Two Dimensional Silicon Photonic Crystal

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