Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor

There has been a lot of interest in the tuneability of RF inductors to realize the reconfigurable RF systems for a miniaturized on-chip solution. This approach is still a challenge as high inductance tuning range and high quality factor should be obtained simultaneously. Various prior tuning tech...

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Main Author:	Hoveizavi, Fatemeh Bani Torfian
Format:	Thesis
Language:	English
Published:	2016
Subjects:	T Technology
Online Access:	http://eprints.usm.my/45828/1/Design%2C%20Fabrication%20And%20Characterization%20Of%20Micro%20Fluidic%20And%20Cmos-Based%20Process%20Technology%20Rf%20Tuneable%20Inductor.pdf
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spelling	my-usm-ep.458282021-11-17T03:42:17Z Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor 2016-11 Hoveizavi, Fatemeh Bani Torfian T Technology TK Electrical Engineering. Electronics. Nuclear Engineering There has been a lot of interest in the tuneability of RF inductors to realize the reconfigurable RF systems for a miniaturized on-chip solution. This approach is still a challenge as high inductance tuning range and high quality factor should be obtained simultaneously. Various prior tuning techniques such as switched turns, switched mutual inductance, bimorph-effect-based varied-coupling and switched magnetic field are studied. The tuning range is less than 60% for state-of-art tunable inductors while the obtained quality factor is low. The research goals of this work are to design a novel tunable inductor with high tuning range and high quality factor for radio frequency wireless applications using microfluids as well as to design a CMOS-based tunable inductor with fine tuning range and high quality factor for microwave wireless applications. Equation-based parametric analysis for planar and three-dimensional inductors are investigated. The contributions of physical and electrical parameters, effective in inductance variation, are determined and new tuning techniques are proposed. The permeable liquids specially the ferrofluids are investigated. Three liquid-based variable inductor including tunable planar spiral inductor, tunable wirewound solenoid inductor and tunable wire-bonded solenoid inductor are proposed. The tunable inductors were simulated and measured with injecting ferrofluids into the core. The liquid-based proposed technique to vary the permeability of the solenoid core showed that using liquids with different magnetic particle concentration varies the inductance significantly while the quality factor degradation is less severe than the prior works. Using the ferrofluids with different magnetic Nano-particle concentration injected to PDMS-based channel, different tuning range and self-resonance frequencies were obtained. The measured tuning ratio for the wire-wound inductor was obtained around 90.6% with a maximum Q factor of 129. The tuning ratio for the wirebonded inductor was measured as 81% with a maximum quality factor of 39.8. Besides, the proposed fine-tunable 0.11-μm CMOS structure to control the magnetic flow in the planar inductors was simulated and measured. The inductance can be tuned for 9 different values and a tuning range of 6.5% is obtained at 1.7 GHz. In addition, in order to miniaturize the inductor, the MEMS process to realize 3D solenoid inductor on tiny scales is proposed. The quality factor in all proposed designs are remained in acceptable range for high-frequency wireless applications. Also, the measured results for CMOS-based proposed technique showed the quality factor is intact while fine tuning ratio is achieved. 2016-11 Thesis http://eprints.usm.my/45828/ http://eprints.usm.my/45828/1/Design%2C%20Fabrication%20And%20Characterization%20Of%20Micro%20Fluidic%20And%20Cmos-Based%20Process%20Technology%20Rf%20Tuneable%20Inductor.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Elektrik & Elektronik
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	T Technology T Technology
spellingShingle	T Technology T Technology Hoveizavi, Fatemeh Bani Torfian Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor
description	There has been a lot of interest in the tuneability of RF inductors to realize the reconfigurable RF systems for a miniaturized on-chip solution. This approach is still a challenge as high inductance tuning range and high quality factor should be obtained simultaneously. Various prior tuning techniques such as switched turns, switched mutual inductance, bimorph-effect-based varied-coupling and switched magnetic field are studied. The tuning range is less than 60% for state-of-art tunable inductors while the obtained quality factor is low. The research goals of this work are to design a novel tunable inductor with high tuning range and high quality factor for radio frequency wireless applications using microfluids as well as to design a CMOS-based tunable inductor with fine tuning range and high quality factor for microwave wireless applications. Equation-based parametric analysis for planar and three-dimensional inductors are investigated. The contributions of physical and electrical parameters, effective in inductance variation, are determined and new tuning techniques are proposed. The permeable liquids specially the ferrofluids are investigated. Three liquid-based variable inductor including tunable planar spiral inductor, tunable wirewound solenoid inductor and tunable wire-bonded solenoid inductor are proposed. The tunable inductors were simulated and measured with injecting ferrofluids into the core. The liquid-based proposed technique to vary the permeability of the solenoid core showed that using liquids with different magnetic particle concentration varies the inductance significantly while the quality factor degradation is less severe than the prior works. Using the ferrofluids with different magnetic Nano-particle concentration injected to PDMS-based channel, different tuning range and self-resonance frequencies were obtained. The measured tuning ratio for the wire-wound inductor was obtained around 90.6% with a maximum Q factor of 129. The tuning ratio for the wirebonded inductor was measured as 81% with a maximum quality factor of 39.8. Besides, the proposed fine-tunable 0.11-μm CMOS structure to control the magnetic flow in the planar inductors was simulated and measured. The inductance can be tuned for 9 different values and a tuning range of 6.5% is obtained at 1.7 GHz. In addition, in order to miniaturize the inductor, the MEMS process to realize 3D solenoid inductor on tiny scales is proposed. The quality factor in all proposed designs are remained in acceptable range for high-frequency wireless applications. Also, the measured results for CMOS-based proposed technique showed the quality factor is intact while fine tuning ratio is achieved.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Hoveizavi, Fatemeh Bani Torfian
author_facet	Hoveizavi, Fatemeh Bani Torfian
author_sort	Hoveizavi, Fatemeh Bani Torfian
title	Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor
title_short	Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor
title_full	Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor
title_fullStr	Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor
title_full_unstemmed	Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor
title_sort	design, fabrication and characterization of micro fluidic and cmos-based process technology rf tuneable inductor
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Kejuruteraan Elektrik & Elektronik
publishDate	2016
url	http://eprints.usm.my/45828/1/Design%2C%20Fabrication%20And%20Characterization%20Of%20Micro%20Fluidic%20And%20Cmos-Based%20Process%20Technology%20Rf%20Tuneable%20Inductor.pdf
_version_	1747821576158445568

Design, Fabrication And Characterization Of Micro Fluidic And Cmos-Based Process Technology Rf Tuneable Inductor

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