Tubular Linear Switched Reluctance Actuator: Design And Characterization

The linear electromagnetic actuator is receiving significant attention due to recent advances in power electronics and modern control method. Besides that, the manufacturing industry is relying on faster and more accurate positioning system in machine tools to meet the increasing demand for higher m...

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Main Author:	Yeo,, Chin Kiat
Format:	Thesis
Language:	English English
Published:	2019
Subjects:	TK Electrical engineering Electronics Nuclear engineering
Online Access:	http://eprints.utem.edu.my/id/eprint/24718/1/Tubular%20Linear%20Switched%20Reluctance%20Actuator%20Design%20And%20Characterization.pdf http://eprints.utem.edu.my/id/eprint/24718/2/Tubular%20Linear%20Switched%20Reluctance%20Actuator%20Design%20And%20Characterization.pdf
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id	my-utem-ep.24718
record_format	uketd_dc
institution	Universiti Teknikal Malaysia Melaka
collection	UTeM Repository
language	English English
advisor	Md. Ghazaly, Mariam
topic	TK Electrical engineering Electronics Nuclear engineering
spellingShingle	TK Electrical engineering Electronics Nuclear engineering Yeo,, Chin Kiat Tubular Linear Switched Reluctance Actuator: Design And Characterization
description	The linear electromagnetic actuator is receiving significant attention due to recent advances in power electronics and modern control method. Besides that, the manufacturing industry is relying on faster and more accurate positioning system in machine tools to meet the increasing demand for higher machining tolerances. Compare to the pneumatic and hydraulic actuator, the linear electromagnetic actuator has a fast dynamic response, high energy efficiency, and high positioning accuracy. In this thesis, a three-phase tubular linear switched reluctance actuator (LSRA) is proposed for the application in semiconductor fabrication industry. The LSRA with tubular structure seems to be attractive for industrial purposes due to both its closed form and inherently absence of normal force compared to the planar type LSRA. In addition, the tubular LSRA has robust construction, low manufacturing and maintenance cost, good fault tolerance capability and high reliability in the harsh environment make it an attractive alternative to permanent magnet linear actuator. However, the tubular LSRA has a long mover which increases the possibility of the mover to deform during fabrication. So, a new mover design is proposed to overcome the problem by separating the mover into mover shaft, magnetic ring and non-magnetic ring. Subsequently, the proposed mover design allows the travelling distance of the actuator to be modified by adding or removing the rings without changing the shaft. In addition, the design procedures, ranging from design specification and structure determination to optimization of actuator parameters is demonstrated in this thesis. The investigation is achieved through the simulation using the Finite Element Method (FEM) analysis and the performance is evaluated based on the generated thrust force. Then, the tubular LSRA prototype is fabricated according to the optimized design. In order to drive the tubular LSRA, three different high current amplifiers together with the switching algorithm are used to provide the correct switching signal due to this method is simple and straightforward while no extensive knowledge of power electronic converter is required. Next, the force and motion characteristics of the tubular LSRA are evaluated to verify the actuator design and the behaviour of the tubular LSRA is obtained through the open loop experiment. The developed tubular LSRA is capable of generating a maximum static force of 0.65 N which is within the required range needed to be operated in semiconductor fabrication process. Through the open loop reciprocating motion, the dynamic responses of the tubular LSRA are capable of achieving a maximum velocity of 210 mm/s and maximum acceleration of 8 m/s2 which are in the performance range for precision mechanism.
format	Thesis
qualification_name	Master of Philosophy (M.Phil.)
qualification_level	Master's degree
author	Yeo,, Chin Kiat
author_facet	Yeo,, Chin Kiat
author_sort	Yeo,, Chin Kiat
title	Tubular Linear Switched Reluctance Actuator: Design And Characterization
title_short	Tubular Linear Switched Reluctance Actuator: Design And Characterization
title_full	Tubular Linear Switched Reluctance Actuator: Design And Characterization
title_fullStr	Tubular Linear Switched Reluctance Actuator: Design And Characterization
title_full_unstemmed	Tubular Linear Switched Reluctance Actuator: Design And Characterization
title_sort	tubular linear switched reluctance actuator: design and characterization
granting_institution	Universiti Teknikal Malaysia Melaka
granting_department	Faculty of Electrical Engineering
publishDate	2019
url	http://eprints.utem.edu.my/id/eprint/24718/1/Tubular%20Linear%20Switched%20Reluctance%20Actuator%20Design%20And%20Characterization.pdf http://eprints.utem.edu.my/id/eprint/24718/2/Tubular%20Linear%20Switched%20Reluctance%20Actuator%20Design%20And%20Characterization.pdf
_version_	1747834094745550848
spelling	my-utem-ep.247182021-10-05T12:41:17Z Tubular Linear Switched Reluctance Actuator: Design And Characterization 2019 Yeo,, Chin Kiat TK Electrical engineering. Electronics Nuclear engineering The linear electromagnetic actuator is receiving significant attention due to recent advances in power electronics and modern control method. Besides that, the manufacturing industry is relying on faster and more accurate positioning system in machine tools to meet the increasing demand for higher machining tolerances. Compare to the pneumatic and hydraulic actuator, the linear electromagnetic actuator has a fast dynamic response, high energy efficiency, and high positioning accuracy. In this thesis, a three-phase tubular linear switched reluctance actuator (LSRA) is proposed for the application in semiconductor fabrication industry. The LSRA with tubular structure seems to be attractive for industrial purposes due to both its closed form and inherently absence of normal force compared to the planar type LSRA. In addition, the tubular LSRA has robust construction, low manufacturing and maintenance cost, good fault tolerance capability and high reliability in the harsh environment make it an attractive alternative to permanent magnet linear actuator. However, the tubular LSRA has a long mover which increases the possibility of the mover to deform during fabrication. So, a new mover design is proposed to overcome the problem by separating the mover into mover shaft, magnetic ring and non-magnetic ring. Subsequently, the proposed mover design allows the travelling distance of the actuator to be modified by adding or removing the rings without changing the shaft. In addition, the design procedures, ranging from design specification and structure determination to optimization of actuator parameters is demonstrated in this thesis. The investigation is achieved through the simulation using the Finite Element Method (FEM) analysis and the performance is evaluated based on the generated thrust force. Then, the tubular LSRA prototype is fabricated according to the optimized design. In order to drive the tubular LSRA, three different high current amplifiers together with the switching algorithm are used to provide the correct switching signal due to this method is simple and straightforward while no extensive knowledge of power electronic converter is required. Next, the force and motion characteristics of the tubular LSRA are evaluated to verify the actuator design and the behaviour of the tubular LSRA is obtained through the open loop experiment. The developed tubular LSRA is capable of generating a maximum static force of 0.65 N which is within the required range needed to be operated in semiconductor fabrication process. Through the open loop reciprocating motion, the dynamic responses of the tubular LSRA are capable of achieving a maximum velocity of 210 mm/s and maximum acceleration of 8 m/s2 which are in the performance range for precision mechanism. 2019 Thesis http://eprints.utem.edu.my/id/eprint/24718/ http://eprints.utem.edu.my/id/eprint/24718/1/Tubular%20Linear%20Switched%20Reluctance%20Actuator%20Design%20And%20Characterization.pdf text en public http://eprints.utem.edu.my/id/eprint/24718/2/Tubular%20Linear%20Switched%20Reluctance%20Actuator%20Design%20And%20Characterization.pdf text en validuser https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=116871 mphil masters Universiti Teknikal Malaysia Melaka Faculty of Electrical Engineering Md. Ghazaly, Mariam 1. Ajeesh, K.A. and Vincent, G., 2016. 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Tubular Linear Switched Reluctance Actuator: Design And Characterization

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