Silterra cleaning solution in post chemical mechanical polishing oxide to minimize ammoniacal nitrogen in effluent
Malaysia’s Department of Environment (DOE) has introduced ammoniacal nitrogen as a new parameter to be regulated under the Environment Quality (Industrial Effluents) Act effective from 1st January 2010. The penalty for not complying to any provision of the Environmental Quality Act (EQA) is a fine n...
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| Format: | Thesis |
| Language: | English English |
| Published: |
2023
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/28300/1/Silterra%20cleaning%20solution%20in%20post%20chemical%20mechanical%20polishing%20oxide%20to%20minimize%20ammoniacal%20nitrogen%20in%20effluent.pdf http://eprints.utem.edu.my/id/eprint/28300/2/Silterra%20cleaning%20solution%20in%20post%20chemical%20mechanical%20polishing%20oxide%20to%20minimize%20ammoniacal%20nitrogen%20in%20effluent.pdf |
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