Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor

Titanium dioxide (TiO2) thin film gas sensors have been widely used and investigated in the detection of target gases. However, to obtain anatase phase for oxygen gas sensor with low and short annealing temperature is the obstacle in the fabrication of oxygen gas sensor. It is thus desirable to d...

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Main Author:	Bakri, Anis Suhaili
Format:	Thesis
Language:	English English English
Published:	2017
Subjects:	QD146-197 Inorganic chemistry
Online Access:	http://eprints.uthm.edu.my/743/1/24p%20ANIS%20SUHAILI%20BAKRI.pdf http://eprints.uthm.edu.my/743/2/ANIS%20SUHAILI%20BAKRI%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/743/3/ANIS%20SUHAILI%20BAKRI%20WATERMARK.pdf
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spelling	my-uthm-ep.7432021-08-30T07:45:39Z Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor 2017-12 Bakri, Anis Suhaili QD146-197 Inorganic chemistry Titanium dioxide (TiO2) thin film gas sensors have been widely used and investigated in the detection of target gases. However, to obtain anatase phase for oxygen gas sensor with low and short annealing temperature is the obstacle in the fabrication of oxygen gas sensor. It is thus desirable to develop TiO2 thin film preparation technique that provides the anatase phase for oxygen gas sensor at low and short annealing temperature. In this study, the dip coating method was used to fabricate the TiO2 thin film. The parameters such as deposition layer, withdrawal speed of dip coating and annealing temperature were varied to optimize the properties of thin film. The optimum parameters are obtained from the 1 layer deposition film, 10 mm/ min withdrawal speed of dip coating, and annealed the film at 400 °C in electrical furnace. Crystal structure studies showed that the optimized TiO2 thin film is anatase phase with tetragonal lattice structure and (101) plane is the dominant peak. Morphological studies indicated that the film is even and uniform in manner with grain size of 13.3 nm. The crystallite size obtained from HIGHSCORE software is 69.02 nm and calculated crystallite size using Scherrer’s equation is 55.7 nm. The electrical studies showed that the film resistivity is 1.64 x 10 -3 Ω.cm. The gas sensor measurement revealed that the response and recovery time of TiO2 thin film sensor at room temperature is about 13.22 s and 2.67 s, respectively. Thus, proving that the potential to use the TiO2 thin film fabricated by dip coating as active layer in oxygen gas sensor. 2017-12 Thesis http://eprints.uthm.edu.my/743/ http://eprints.uthm.edu.my/743/1/24p%20ANIS%20SUHAILI%20BAKRI.pdf text en public http://eprints.uthm.edu.my/743/2/ANIS%20SUHAILI%20BAKRI%20COPYRIGHT%20DECLARATION.pdf text en staffonly http://eprints.uthm.edu.my/743/3/ANIS%20SUHAILI%20BAKRI%20WATERMARK.pdf text en validuser mphil masters Universiti Tun Hussein Onn Malaysia Fakulti Kejuruteraan Elektrik dan Elektronik
institution	Universiti Tun Hussein Onn Malaysia
collection	UTHM Institutional Repository
language	English English English
topic	QD146-197 Inorganic chemistry
spellingShingle	QD146-197 Inorganic chemistry Bakri, Anis Suhaili Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
description	Titanium dioxide (TiO2) thin film gas sensors have been widely used and investigated in the detection of target gases. However, to obtain anatase phase for oxygen gas sensor with low and short annealing temperature is the obstacle in the fabrication of oxygen gas sensor. It is thus desirable to develop TiO2 thin film preparation technique that provides the anatase phase for oxygen gas sensor at low and short annealing temperature. In this study, the dip coating method was used to fabricate the TiO2 thin film. The parameters such as deposition layer, withdrawal speed of dip coating and annealing temperature were varied to optimize the properties of thin film. The optimum parameters are obtained from the 1 layer deposition film, 10 mm/ min withdrawal speed of dip coating, and annealed the film at 400 °C in electrical furnace. Crystal structure studies showed that the optimized TiO2 thin film is anatase phase with tetragonal lattice structure and (101) plane is the dominant peak. Morphological studies indicated that the film is even and uniform in manner with grain size of 13.3 nm. The crystallite size obtained from HIGHSCORE software is 69.02 nm and calculated crystallite size using Scherrer’s equation is 55.7 nm. The electrical studies showed that the film resistivity is 1.64 x 10 -3 Ω.cm. The gas sensor measurement revealed that the response and recovery time of TiO2 thin film sensor at room temperature is about 13.22 s and 2.67 s, respectively. Thus, proving that the potential to use the TiO2 thin film fabricated by dip coating as active layer in oxygen gas sensor.
format	Thesis
qualification_name	Master of Philosophy (M.Phil.)
qualification_level	Master's degree
author	Bakri, Anis Suhaili
author_facet	Bakri, Anis Suhaili
author_sort	Bakri, Anis Suhaili
title	Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
title_short	Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
title_full	Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
title_fullStr	Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
title_full_unstemmed	Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
title_sort	optimization of titanium dioxide (tio2) thin film using dip coating technique for oxygen gas sensor
granting_institution	Universiti Tun Hussein Onn Malaysia
granting_department	Fakulti Kejuruteraan Elektrik dan Elektronik
publishDate	2017
url	http://eprints.uthm.edu.my/743/1/24p%20ANIS%20SUHAILI%20BAKRI.pdf http://eprints.uthm.edu.my/743/2/ANIS%20SUHAILI%20BAKRI%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/743/3/ANIS%20SUHAILI%20BAKRI%20WATERMARK.pdf
_version_	1747830672103309312

Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor

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