Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique

This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The charac...

Full description

Saved in:

Bibliographic Details
Main Author:	Morsin, Marlia
Format:	Thesis
Language:	English English English
Published:	2004
Subjects:	TK Electrical engineering Electronics Nuclear engineering TK7800-8360 Electronics
Online Access:	http://eprints.uthm.edu.my/7661/1/24p%20MARLIA%20MORSIN.pdf http://eprints.uthm.edu.my/7661/2/MARLIA%20MORSIN%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/7661/3/MARLIA%20MORSIN%20WATERMARK.pdf
Tags:	Add Tag No Tags, Be the first to tag this record!

id	my-uthm-ep.7661
record_format	uketd_dc
spelling	my-uthm-ep.76612022-09-08T02:19:41Z Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique 2004-11 Morsin, Marlia TK Electrical engineering. Electronics Nuclear engineering TK7800-8360 Electronics This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The characteristics prior to the MOSFET device fabrication namely dry and wet oxidation, etching, resist thiclrness, exposure dose optimization, n-type and p-type spin on dopant and diffusion and also metal thiclrness characterization were recorded. The data were analyzed and applied in the fabrication of MOSFET devices. The MOSFET fabrication process llsed blanket-field oxide for isolation, positive resist for lithography process, Boron and Phosphorus for source/drain doping and aluminum for metallization. The whole MOSFET process had fOllT masking process specifically source/drain masking, gate masking, contact masking, and metal masking. The result for each processes are presented in this thesis. 2004-11 Thesis http://eprints.uthm.edu.my/7661/ http://eprints.uthm.edu.my/7661/1/24p%20MARLIA%20MORSIN.pdf text en public http://eprints.uthm.edu.my/7661/2/MARLIA%20MORSIN%20COPYRIGHT%20DECLARATION.pdf text en staffonly http://eprints.uthm.edu.my/7661/3/MARLIA%20MORSIN%20WATERMARK.pdf text en validuser mphil masters Universiti Tun Hussein Onn Malaysia Fakulti Kejuruteraan Elektrik dan Elektronik
institution	Universiti Tun Hussein Onn Malaysia
collection	UTHM Institutional Repository
language	English English English
topic	TK Electrical engineering Electronics Nuclear engineering TK7800-8360 Electronics
spellingShingle	TK Electrical engineering Electronics Nuclear engineering TK7800-8360 Electronics Morsin, Marlia Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
description	This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The characteristics prior to the MOSFET device fabrication namely dry and wet oxidation, etching, resist thiclrness, exposure dose optimization, n-type and p-type spin on dopant and diffusion and also metal thiclrness characterization were recorded. The data were analyzed and applied in the fabrication of MOSFET devices. The MOSFET fabrication process llsed blanket-field oxide for isolation, positive resist for lithography process, Boron and Phosphorus for source/drain doping and aluminum for metallization. The whole MOSFET process had fOllT masking process specifically source/drain masking, gate masking, contact masking, and metal masking. The result for each processes are presented in this thesis.
format	Thesis
qualification_name	Master of Philosophy (M.Phil.)
qualification_level	Master's degree
author	Morsin, Marlia
author_facet	Morsin, Marlia
author_sort	Morsin, Marlia
title	Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
title_short	Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
title_full	Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
title_fullStr	Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
title_full_unstemmed	Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
title_sort	fabrication, characterization and optimization of in-house mosfet transistor using spin on dopant technique
granting_institution	Universiti Tun Hussein Onn Malaysia
granting_department	Fakulti Kejuruteraan Elektrik dan Elektronik
publishDate	2004
url	http://eprints.uthm.edu.my/7661/1/24p%20MARLIA%20MORSIN.pdf http://eprints.uthm.edu.my/7661/2/MARLIA%20MORSIN%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/7661/3/MARLIA%20MORSIN%20WATERMARK.pdf
_version_	1747831175386234880

Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique

Similar Items