Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application

A gas sensor is a device used to warn us of dangerous gases Gas sensors based on metal oxides semiconductors are important devices in modern technologies. Gas sensors play critical roles in many fields such as industrial production, environmental pollution, and traffic safety. Cupric oxide (CuO) thi...

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Main Author:	Lim, Hui Teng
Format:	Thesis
Language:	English English English
Published:	2017
Subjects:	QC Physics
Online Access:	http://eprints.uthm.edu.my/7806/1/24p%20LIM%20HUI%20TENG.pdf http://eprints.uthm.edu.my/7806/2/LIM%20HUI%20TENG%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/7806/3/LIM%20HUI%20TENG%20WATERMARK.pdf
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spelling	my-uthm-ep.78062022-10-12T02:19:55Z Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application 2017-01 Lim, Hui Teng QC Physics QC170-197 Atomic physics. Constitution and properties of matter. Including molecular physics, relativity, quantum theory, and solid state physics A gas sensor is a device used to warn us of dangerous gases Gas sensors based on metal oxides semiconductors are important devices in modern technologies. Gas sensors play critical roles in many fields such as industrial production, environmental pollution, and traffic safety. Cupric oxide (CuO) thin films were prepared on a glass and FTO substrates by thermal CVD method. The substrate, deposition temperature, oxygen flow rate, and substrate were varying during deposition. The morphological, optical and electrical properties of CuO films were characterized by FE-SEM, atomic force microscopy (AFM), ultra-violet visible spectrophotometer, respectively, two point probe techniques and Keithley system. The FE-SEM result showed that spherical and uniform shaped were obtained on a glass substrate while the porous structure was obtained on FTO. AFM showed well organized morphology with the highest root mean square surface roughness for CuO thin films on glass and FTO substrates were 23 and 27nm, respectively. The optical direct band gap energy of the CuO film grown on glass and FTO substrate were in the range 1.8-l.86eV. The current-voltage characteristic has been formed with the threshold voltage (V th) of 2V and breakdown voltage (Vs) of -SV. The highest value of resistance was obtained which is 6.99xl06 0 when the CuO sensing element is contacted with to ethanol liquid. This work has successfully demonstrated the formation of optimized copper oxide thin films and for ethanol sensing application. 2017-01 Thesis http://eprints.uthm.edu.my/7806/ http://eprints.uthm.edu.my/7806/1/24p%20LIM%20HUI%20TENG.pdf text en public http://eprints.uthm.edu.my/7806/2/LIM%20HUI%20TENG%20COPYRIGHT%20DECLARATION.pdf text en staffonly http://eprints.uthm.edu.my/7806/3/LIM%20HUI%20TENG%20WATERMARK.pdf text en validuser mphil masters Universiti Tun Hussein Onn Malaysia Fakulti Kejuruteraan Elektrik dan Elektronik
institution	Universiti Tun Hussein Onn Malaysia
collection	UTHM Institutional Repository
language	English English English
topic	QC Physics QC Physics
spellingShingle	QC Physics QC Physics Lim, Hui Teng Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application
description	A gas sensor is a device used to warn us of dangerous gases Gas sensors based on metal oxides semiconductors are important devices in modern technologies. Gas sensors play critical roles in many fields such as industrial production, environmental pollution, and traffic safety. Cupric oxide (CuO) thin films were prepared on a glass and FTO substrates by thermal CVD method. The substrate, deposition temperature, oxygen flow rate, and substrate were varying during deposition. The morphological, optical and electrical properties of CuO films were characterized by FE-SEM, atomic force microscopy (AFM), ultra-violet visible spectrophotometer, respectively, two point probe techniques and Keithley system. The FE-SEM result showed that spherical and uniform shaped were obtained on a glass substrate while the porous structure was obtained on FTO. AFM showed well organized morphology with the highest root mean square surface roughness for CuO thin films on glass and FTO substrates were 23 and 27nm, respectively. The optical direct band gap energy of the CuO film grown on glass and FTO substrate were in the range 1.8-l.86eV. The current-voltage characteristic has been formed with the threshold voltage (V th) of 2V and breakdown voltage (Vs) of -SV. The highest value of resistance was obtained which is 6.99xl06 0 when the CuO sensing element is contacted with to ethanol liquid. This work has successfully demonstrated the formation of optimized copper oxide thin films and for ethanol sensing application.
format	Thesis
qualification_name	Master of Philosophy (M.Phil.)
qualification_level	Master's degree
author	Lim, Hui Teng
author_facet	Lim, Hui Teng
author_sort	Lim, Hui Teng
title	Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application
title_short	Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application
title_full	Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application
title_fullStr	Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application
title_full_unstemmed	Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application
title_sort	fabrication and characterization of copper oxide thin film by thermal cvd for ethanol sensor application
granting_institution	Universiti Tun Hussein Onn Malaysia
granting_department	Fakulti Kejuruteraan Elektrik dan Elektronik
publishDate	2017
url	http://eprints.uthm.edu.my/7806/1/24p%20LIM%20HUI%20TENG.pdf http://eprints.uthm.edu.my/7806/2/LIM%20HUI%20TENG%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/7806/3/LIM%20HUI%20TENG%20WATERMARK.pdf
_version_	1747831193695420416

Fabrication and characterization of copper oxide thin film by thermal CVD for ethanol sensor application

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