Electrical properties of copper nitride thin film prepared by reactive DC sputtering

The purpose of this research is to study the electrical properties of copper nitride (Cu3N) thin films. Cu3N were deposited on corning glass substrates by using reactive DC sputtering technique. Four samples were prepared with different deposition time to obtain samples of different thicknesses. The...

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Main Author:	Wan Mohd. Noral Azman, Wan Noor Ezianti
Format:	Thesis
Language:	English
Published:	2013
Subjects:	Q Science (General)
Online Access:	http://eprints.utm.my/id/eprint/32043/1/WanNoorEziantiMFS2013.pdf
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id	my-utm-ep.32043
record_format	uketd_dc
spelling	my-utm-ep.320432017-09-18T07:23:28Z Electrical properties of copper nitride thin film prepared by reactive DC sputtering 2013-01 Wan Mohd. Noral Azman, Wan Noor Ezianti Q Science (General) The purpose of this research is to study the electrical properties of copper nitride (Cu3N) thin films. Cu3N were deposited on corning glass substrates by using reactive DC sputtering technique. Four samples were prepared with different deposition time to obtain samples of different thicknesses. The thickness of the samples increases as the deposition time increase. The electrical conductivity of Cu3N thin films was measured by using the Van der Pauw method. Results obtained show that the conductivity of Cu3N films increases as the thickness of the films increases. The effect of temperature on conductivity of the Cu3N thin film was also studied. The conductivity of the samples was measured under high temperature from 313 K to 573 K. The results show that the conductivity of Cu3N thin films increases as the temperature increases. The activation energy was also calculated. The sample with high conductivity has low activation energy. 2013-01 Thesis http://eprints.utm.my/id/eprint/32043/ http://eprints.utm.my/id/eprint/32043/1/WanNoorEziantiMFS2013.pdf application/pdf en public masters Universiti Teknologi Malaysia, Faculty of Science Faculty of Science
institution	Universiti Teknologi Malaysia
collection	UTM Institutional Repository
language	English
topic	Q Science (General)
spellingShingle	Q Science (General) Wan Mohd. Noral Azman, Wan Noor Ezianti Electrical properties of copper nitride thin film prepared by reactive DC sputtering
description	The purpose of this research is to study the electrical properties of copper nitride (Cu3N) thin films. Cu3N were deposited on corning glass substrates by using reactive DC sputtering technique. Four samples were prepared with different deposition time to obtain samples of different thicknesses. The thickness of the samples increases as the deposition time increase. The electrical conductivity of Cu3N thin films was measured by using the Van der Pauw method. Results obtained show that the conductivity of Cu3N films increases as the thickness of the films increases. The effect of temperature on conductivity of the Cu3N thin film was also studied. The conductivity of the samples was measured under high temperature from 313 K to 573 K. The results show that the conductivity of Cu3N thin films increases as the temperature increases. The activation energy was also calculated. The sample with high conductivity has low activation energy.
format	Thesis
qualification_level	Master's degree
author	Wan Mohd. Noral Azman, Wan Noor Ezianti
author_facet	Wan Mohd. Noral Azman, Wan Noor Ezianti
author_sort	Wan Mohd. Noral Azman, Wan Noor Ezianti
title	Electrical properties of copper nitride thin film prepared by reactive DC sputtering
title_short	Electrical properties of copper nitride thin film prepared by reactive DC sputtering
title_full	Electrical properties of copper nitride thin film prepared by reactive DC sputtering
title_fullStr	Electrical properties of copper nitride thin film prepared by reactive DC sputtering
title_full_unstemmed	Electrical properties of copper nitride thin film prepared by reactive DC sputtering
title_sort	electrical properties of copper nitride thin film prepared by reactive dc sputtering
granting_institution	Universiti Teknologi Malaysia, Faculty of Science
granting_department	Faculty of Science
publishDate	2013
url	http://eprints.utm.my/id/eprint/32043/1/WanNoorEziantiMFS2013.pdf
_version_	1747815907534569472

Electrical properties of copper nitride thin film prepared by reactive DC sputtering

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