Carbon removal of mold sample by femtosecond laser
Clean mold tool is important in large scale production of high quality integrated circuit chip. Conventional mold tool cleaning techniques often involve chemicals as cleaning agent which is costly and polluting process hence light is suggested as a non-chemical agent alternative. High intensity ligh...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2018
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| Online Access: | http://eprints.utm.my/id/eprint/81127/1/MohamadAizatAbuMFS2018.pdf |
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