Etching performance of silicon wafers with redesigned etching drum
Etching process involves various chemical reactions and reflects significantly on silicon wafer quality. This master project addresses the major problem on wafers during etching that is wafer removal distribution throughout etching drum compartment. The etching drum has been redesigned to overcome t...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/9445/1/RozzetaDolahFKM2005.pdf |
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