Performance in enhancement of microfluidic-based capacitive pressure sensor

This study aims to enhance the performance of microfluidic-based capacitive pressuresensor using square membrane shapes and ellipse and square-shaped microchannel patterns.This study also investigates the pressure sensor using propylene carbonate as electrolyte in termof boiling point and dielectric...

Full description

Saved in:

Bibliographic Details
Main Author:	Muhammad Rashidi Ab Razak
Format:	thesis
Language:	eng
Published:	2020
Subjects:
Online Access:	https://ir.upsi.edu.my/detailsg.php?det=6833
Tags:	Add Tag No Tags, Be the first to tag this record!

id	oai:ir.upsi.edu.my:6833
record_format	uketd_dc
institution	Universiti Pendidikan Sultan Idris
collection	UPSI Digital Repository
language	eng
topic
spellingShingle	Muhammad Rashidi Ab Razak Performance in enhancement of microfluidic-based capacitive pressure sensor
description	This study aims to enhance the performance of microfluidic-based capacitive pressuresensor using square membrane shapes and ellipse and square-shaped microchannel patterns.This study also investigates the pressure sensor using propylene carbonate as electrolyte in termof boiling point and dielectric constant. The microfluidic-based capacitive pressure sensorinvestigates for pressure measurement by using square and ellipse-shaped microchannel patterns. When a pressure was applied on to the membrane, it provides deflection anddisplaces the liquid inside the microchannel. The liquid movement induces changes incapacitance. During the design stage, a simulation analysis on two different membranestructures, including square and rectangular, were studied. In addition, two differentmicrochannel designs, including ellipse and square shape pattern, were designed and simulated. Thefinalized sensor design was fabricated using soft lithography, printed circuit board (PCB) andsealing process. Then, a fluidic-based pressure sensor was characterized based on fluidmechanism, pressure measurement, temperature effect and lifetime effect. Theexperimental result showed that the fluid mechanism for the ellipse-shapedmicrochannel was linearly increased as the pressure increase compared to the square shape which wasnon-linear. For pressure measurement, error percentage of hysteresis was obtained for theellipse-shaped microchannel is 0.6% which was quite low compared to the square-shapedmicrochannel, which is 23% of error. For the temperature effect of the ellipse-shapedmicrochannel, its capacitance increased about 0.86% ranging from 20 to 50 ?C, which issuitable for a sensor to operate at room temperature. The use of the propylene carbonateincreased the lifespan of the sensor due to its boiling point property. In conclusion, afluidic-based capacitive pressure sensor was successfully developed using a square and an ellipse-shaped microchannel. The ellipse-shaped microchannel showedexcellent performance than the square-shaped microchannel. For the research implication,it can be used by researchers as a guideline and reference especially in developing pressure sensors.
format	thesis
qualification_name
qualification_level	Master's degree
author	Muhammad Rashidi Ab Razak
author_facet	Muhammad Rashidi Ab Razak
author_sort	Muhammad Rashidi Ab Razak
title	Performance in enhancement of microfluidic-based capacitive pressure sensor
title_short	Performance in enhancement of microfluidic-based capacitive pressure sensor
title_full	Performance in enhancement of microfluidic-based capacitive pressure sensor
title_fullStr	Performance in enhancement of microfluidic-based capacitive pressure sensor
title_full_unstemmed	Performance in enhancement of microfluidic-based capacitive pressure sensor
title_sort	performance in enhancement of microfluidic-based capacitive pressure sensor
granting_institution	Universiti Pendidikan Sultan Idris
granting_department	Fakulti Sains dan Matematik
publishDate	2020
url	https://ir.upsi.edu.my/detailsg.php?det=6833
_version_	1747833317797920768
spelling	oai:ir.upsi.edu.my:68332022-03-01 Performance in enhancement of microfluidic-based capacitive pressure sensor 2020 Muhammad Rashidi Ab Razak This study aims to enhance the performance of microfluidic-based capacitive pressuresensor using square membrane shapes and ellipse and square-shaped microchannel patterns.This study also investigates the pressure sensor using propylene carbonate as electrolyte in termof boiling point and dielectric constant. The microfluidic-based capacitive pressure sensorinvestigates for pressure measurement by using square and ellipse-shaped microchannel patterns. When a pressure was applied on to the membrane, it provides deflection anddisplaces the liquid inside the microchannel. The liquid movement induces changes incapacitance. During the design stage, a simulation analysis on two different membranestructures, including square and rectangular, were studied. In addition, two differentmicrochannel designs, including ellipse and square shape pattern, were designed and simulated. Thefinalized sensor design was fabricated using soft lithography, printed circuit board (PCB) andsealing process. Then, a fluidic-based pressure sensor was characterized based on fluidmechanism, pressure measurement, temperature effect and lifetime effect. Theexperimental result showed that the fluid mechanism for the ellipse-shapedmicrochannel was linearly increased as the pressure increase compared to the square shape which wasnon-linear. For pressure measurement, error percentage of hysteresis was obtained for theellipse-shaped microchannel is 0.6% which was quite low compared to the square-shapedmicrochannel, which is 23% of error. For the temperature effect of the ellipse-shapedmicrochannel, its capacitance increased about 0.86% ranging from 20 to 50 ?C, which issuitable for a sensor to operate at room temperature. The use of the propylene carbonateincreased the lifespan of the sensor due to its boiling point property. In conclusion, afluidic-based capacitive pressure sensor was successfully developed using a square and an ellipse-shaped microchannel. The ellipse-shaped microchannel showedexcellent performance than the square-shaped microchannel. For the research implication,it can be used by researchers as a guideline and reference especially in developing pressure sensors. 2020 thesis https://ir.upsi.edu.my/detailsg.php?det=6833 https://ir.upsi.edu.my/detailsg.php?det=6833 text eng closedAccess Masters Universiti Pendidikan Sultan Idris Fakulti Sains dan Matematik Almassri, A. M., Wan Hasan, W. Z., Ahmad, S. A., Ishak, A. J., Ghazali, A. M.,Talib, D. N., et al (2015). Pressure sensor: state of the art, design, and applicationfor robotic hand. Journal of Sensors, 2015.Antony, R., Nandagopal, M. G., Sreekumar, N., & Selvaraju, N. (2014). Detectionprinciples and development of microfluidic sensors in the last decade.Microsystem Technologies, 20(6), 1051-1061.Chen, J. Z., Darhuber, A. A., Troian, S. M., & Wagner, S. (2004). Capacitive sensing of dropletsfor microfluidic devices based on thermocapillary actuation. Lab on a Chip, 4(5), 473-480.Chen, J., & Liu, C. (2003). Development and characterization of surfacemicromachined, out-of-plane hot-wire anemometer. Journal ofMicroelectromechanical systems, 12(6), 979-988.DeHennis, A., Chae, J., & Baroutaji, A. (2016). Pressure sensors.Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S., Wiegerink, R. J., & Elwenspoek,M. (2007, January). Miniaturized flow sensor with planar integrated sensorstructures on semicircular surface channels. In 2007 IEEE 20th International Conference onMicro Electro Mechanical Systems (MEMS) (pp. 123-126). IEEE.Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S., Wiegerink, R. J., & Elwenspoek,M. (2008). Miniaturized thermal flow sensor with planar- integrated sensorstructures on semicircular surface channels. Sensors and Actuators A: Physical, 143(1), 1-6.Dijkstra, M., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. (2006). Nano- flow thermalsensor applying dynamic -2 sensing method. In Proceeding of MME.Eaton, W. P., & Smith, J. H. (1997). Micromachined pressure sensors: review and recentdevelopments. Smart Materials and Structures, 6(5), 530.Elbuken, C., Glawdel, T., Chan, D., & Ren, C. L. (2011). Detection of microdroplet size and speedusing capacitive sensors. Sensors and Actuators A: Physical, 171(2), 55-62.Eswaran, P., & Malarvizhi, S. (2012, March). Sensitivity analysis on mems capacitive differential pressure sensor with bossed diaphragm membrane. In 2012 International Conference onDevices, Circuits and Systems (ICDCS) (pp. 704-707). IEEE.Eswaran, P., & Malarvizhi, S. (2013). MEMS capacitive pressure sensors: a review onrecent development and prospective.Ferrari, V., & Prudenziati, M. (2012). Printed thick-film capacitive sensors. In Printed Films (pp.193-220). Woodhead Publishing.Fleming, W. J. (2001). Overview of automotive sensors. IEEE sensors journal, 1(4), 296-308.Ganji, B. A., & SHAMS, N. M. (2013). Modeling of capacitance and sensitivity of a MEMS pressuresensor with clamped square diaphragm.Gentili, E., Tabaglio, L., & Aggogeri, F. (2005). Review on micromachiningtechniques. In AMST05 advanced manufacturing systems and technology (pp. 387-396).Springer, Vienna.Gieles, A. (1969, February). Subminiature silicon pressure transducer. In 1969 IEEE InternationalSolid-State Circuits Conference. Digest of Technical Papers (Vol. 12, pp. 108-109). IEEE.Gunawardane, K & Kularatna, N, (2015). Capacitors as energy storage devices simplebasics to current commercial families, Energy Storage Devices for Electronic Systems,Academic Press, Pages 137-148, ISBN 9780124079472,Han, J., & Shannon, M. A. (2009). Smooth contact capacitive pressure sensors intouch-and peeling-mode operation. IEEE Sensors Journal, 9(3), 199-206.Jeong, W., & Seong, J. (2014). Comparison of effects on technical variances ofcomputational fluid dynamics (CFD) software based on finite element and finite volumemethods. International Journal of Mechanical Sciences, 78, 19- 26.Kim, H. K., Lee, S., & Yun, K. S. (2011). Capacitive tactile sensor array for touch screenapplication. Sensors and Actuators A: Physical, 165(1), 2-7.Lei, K. F., Lee, K. F., & Lee, M. Y. (2012). Development of a flexible PDMScapacitive pressure sensor for plantar pressure measurement. Microelectronic Engineering, 99, 1-5.Lei, K. F., Lee, K. F., & Lee, M. Y. (2014). A flexible PDMS capacitive tactile sensor with adjustable measurement range for plantar pressure measurement. Microsystemtechnologies, 20(7), 1351-1358.Lichtenberg, J., & Hierlemann, A. (2005, June). Liquid-core, piezoresistive, fullypolymer-based pressure sensor. In The 13th International Conference on Solid-StateSensors, Actuators and Microsystems, 2005. Digest of TechnicalPapers. TRANSDUCERS'05. (Vol. 1, pp. 491-494). IEEE.Liu, C. (2007). Recent developments in polymer MEMS. Advanced Materials, 19(22),3783-3790.Manaf, A. B. A., Nakamura, K., & Matsumoto, Y. (2008). Characterization ofminiaturized one-side-electrode-type fluid-based inclinometer. Sensors and Actuators A:Physical, 144(1), 74-82.Marjani, A., & Shirazian, S. (2011). Simulation of heavy metal extraction in membranecontactors using computational fluid dynamics. Desalination, 281, 422-428.Mark J.E., Ed., Polymer Data Handbook, vol. 2. New York, NY, USA: Oxford Univ.Press, 2009.McDonald, J. C., Duffy, D. C., Anderson, J. R., Chiu, D. T., Wu, H., Schueller, O. J., et al(2000). Fabrication of microfluidic systems in poly (dimethylsiloxane). ELECTROPHORESIS: AnInternational Journal, 21(1), 27-40.Melani, M., Bertini, L., De Marinis, M., Lange, P., D'Ascoli, F., & Fanucci, L. (2008, March). Hotwire anemometric MEMS sensor for water flow monitoring. In Proceedings of the conference ondesign, automation and test in europe (pp. 342-347). ACM.Mitrakos, V., Macintyre, L., Denison, F., Hands, P., & Desmulliez, M. (2017). Design,manufacture and testing of capacitive pressure sensors for low- pressure measurementranges. Micromachines, 8(2), 41.Mizuno, Y., Liger, M., & Tai, Y. C. (2004, January). Nanofluidic flowmeter using carbonsensing element. In 17th IEEE International Conference on Micro Electro MechanicalSystems. Maastricht MEMS 2004 Technical Digest (pp. 322-325). IEEE.Nallathambi, A., & Shanmuganantham, T. (2015). Design of Diaphragm Based MEMS Pressure Sensor with Sensitivity Analysis for Environmental Applications. Sensors & Transducers,188(5), 48.Narakathu, B. B., Eshkeiti, A., Reddy, A. S. G., Rebros, M., Rebrosova, E., Joyce, M.K. et al (2012, October). A novel fully printed and flexible capacitive pressure sensor. InSENSORS, 2012 IEEE (pp. 1-4). IEEE.Nawi, M. N. M., Manaf, A. A., Rahman, M. F. A., Arshad, M. R., & Sidek, O. (2014).One-side-electrode-type fluidic-based capacitive pressure sensor. IEEE SensorsJournal, 15(3), 1738-1746.Park, J. Y., Yoo, S. J., Lee, E. J., Lee, D. H., Kim, J. Y., & Lee, S. H.(2010).Increased poly (dimethylsiloxane) stiffness improves viability andmorphology of mouse fibroblast cells. BioChip Journal, 4(3), 230-236.Patsis, G. P., Petropoulos, A., & Kaltsas, G. (2012). Modelling and evaluation of athermal microfluidic sensor fabricated on plastic substrate. Microsystemtechnologies, 18(3), 359-364.Puers, R. (1993). Capacitive sensors: when and how to use them. Sensors and ActuatorsA: Physical, 37, 93-105.Rahman, M. F. A., Arshad, M. R., Manaf, A. A., & Yaacob, M. I. H. (2011, September).Modelling of a novel design of microfluidic based acoustic sensor. In 2011 IEEERegional Symposium on Micro and Nano Electronics (pp. 56-59). IEEE.Rahman, M. F. A., Manaf, A. A., & Arshad, M. R. (2013). Capacitive effect of coplanarelectrodes partially outside the microchannel region for underwater microfluidic-basedsensor.Rahman, M. F. A., Nawi, M. N. M., Manaf, A. A., & Arshad, M. R. (2014).Characterization of Microfluidic-Based Acoustic Sensor for Immersion Application. IEEESensors Journal, 15(3), 1559-1566.Roberts, P., Damian, D. D., Shan, W., Lu, T., & Majidi, C. (2013, May). Soft-matter capacitivesensor for measuring shear and pressure deformation. In 2013 IEEE International Conference onRobotics and Automation (pp. 3529-3534). IEEE.Saini, A., Ahmad, D., & Patra, K. (2016, April). Electromechanical performance analysis of inflated dielectric elastomer membrane for micro pump applications. InElectroactive Polymer Actuators and Devices (EAPAD) 2016 (Vol. 9798, p. 979813). InternationalSociety for Optics and Photonics.Sekimori, Y., Yoshida, Y., & Kitamori, T. (2004, October). Pressure sensor for micro chemicalsystem on a chip. In SENSORS, 2004 IEEE (pp. 516-519). IEEE.Shuai, X., Zhu, P., Zeng, W., Hu, Y., Liang, X., Zhang, Y., et al (2017). Highlysensitive flexible pressure sensor based on silver nanowires-embeddedpolydimethylsiloxane electrode with microarray structure. ACS applied materials &interfaces, 9(31), 26314-26324Singh, K., Joyce, R., Varghese, S., & Akhtar, J. (2015). Fabrication of electron beam physicalvapor deposited polysilicon piezoresistive MEMS pressure sensor. Sensors and Actuators A:Physical, 223, 151-158.Sparks, D. (2013). MEMS pressure and flow sensors for automotive enginemanagement and aerospace applications. In MEMS for Automotive and Aerospace Applications(pp. 78-105). Woodhead Publishing.Suter, J. D., Hohimer, C. J., Fricke, J. M., Christ, J., Kim, H., & Evans, A. T. (2013). Principlesof meniscus-based MEMS gas or liquid pressure sensors. Journal ofMicroelectromechanical Systems, 22(3), 670-677.Timoshenko, Stephen P., and Sergius Woinowsky-Krieger. Theory of plates andshells. McGraw-hill, 1959.Wang, Z., Volinsky, A. A., & Gallant, N. D. (2014). Crosslinking effect onpolydimethylsiloxane elastic modulus measured by custom?built compression instrument. Journal ofApplied Polymer Science, 131(22).Woo, S. J., Kong, J. H., Kim, D. G., & Kim, J. M. (2014). A thin all-elastomericcapacitive pressure sensor array based on micro-contact printed elastic conductors.Journal of Materials Chemistry C, 2(22), 4415-4422.Wu, C. Y., Liao, W. H., & Tung, Y. C. (2011). Integrated ionic liquid-basedelectrofluidic circuits for pressure sensing within polydimethylsiloxane microfluidicsystems. Lab on a Chip, 11(10), 1740-1746.Wu, S., Lin, Q., Yuen, Y., & Tai, Y. C. (2001). MEMS flow sensors for nano-fluidic applications.Sensors and Actuators A: Physical, 89(1-2), 152-158.Xiaoli, Z. (2013)., Effects of different reaction conditions on the synthesis ofpropylene carbonate. Org Chem Ind J. Vol: 9(12).Yuichi Shinmoto, 2001, 4 - Vehicle optical sensor, Editor(s): Ljubo Vlacic, Michel Parent,Fumio Harashima, In Automotive Engineering Series, Intelligent Vehicle Technologies, Butterworth-Heinemann, Pages 87-112, ISBN 9780750650939,https://doi.org/10.1016/B978-075065093-9/50006-2.Yunus, N. A. M., Halin, I. A., Sulaiman, N., Ismail, N. F., & Sheng, O. K. (2015). Valuation onMEMS Pressure Sensors and Device Applications. International Journal of Electrical, Computer,Energetic, Electronic and Communication Engineering, 9(8).Zhang, Y., Howver, R., Gogoi, B., & Yazdi, N. (2011, June). A high-sensitive ultra- thin MEMScapacitive pressure sensor. In 2011 16th International Solid-State Sensors, Actuators andMicrosystems Conference (pp. 112-115). IEEE.Zhuo, B., Chen, S., Zhao, M., & Guo, X. (2017). High sensitivity flexible capacitive pressuresensor using polydimethylsiloxane elastomer dielectric layer micro- structured by 3-D printedmold. IEEE Journal of the Electron Devices Society, 5(3), 219-223.Zulfiqar, A., Pfreundt, A., Svendsen, W. E., & Dimaki, M. (2015). Fabrication ofpolyimide based microfluidic channels for biosensor devices. Journal ofMicromechanics and Microengineering, 25(3), 035022.

Performance in enhancement of microfluidic-based capacitive pressure sensor

Similar Items