Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2013.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/id/eprint/5858 |
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| Physical Description: | xix, 195 leaves : illustrations ; 30 cm. Issued also in CD. |
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| Bibliography: | Bibliography: leaves 179-191. |