Experimental and numerical studies on a metallic pulsed capillary discharge as an extreme ultra-violet (EUV) source /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2016.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/12536/ |
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| 001 | u1038246 | ||
| 003 | SIRSI | ||
| 005 | 201608181034 | ||
| 008 | 160818s2016 my a m 000 0 eng | ||
| 040 | |a UMM |d AUM |e rda | ||
| 090 | |a QC3 |b UMP 2016 Cha | ||
| 100 | 1 | |a Chan, Li San, |e author. | |
| 245 | 1 | 0 | |a Experimental and numerical studies on a metallic pulsed capillary discharge as an extreme ultra-violet (EUV) source / |c Chan Li San. |
| 264 | 1 | |c 2016. | |
| 300 | |a xv, 134 leaves, [unnumbered leaves 7] : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b Ph.D |c Jabatan Fizik, Fakulti Sains, Universiti Malaya |d 2016. | ||
| 504 | |a Bibliography: leaves 128-133. | ||
| 650 | 0 | |a Pulsed radiation. | |
| 650 | 0 | |a Ultraviolet radiation. | |
| 650 | 0 | |a Pulsed power systems. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik, |e degree granting institution. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/12536/ |
| 596 | |a 1 25 | ||
| 900 | |a NSM | ||
| 999 | |a QC3 UMP 2016 CHA |w LC |c 1 |i A516412864 |d 11/10/2016 |f 11/10/2016 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 11/10/2016 |1 STEM |o .PUBLIC. Embargoed until 31.12.2020. Released to stack 4-Jan-2021 |o .STAFF. | ||
| 999 | |a QC3 UMP 2016 CHA |w LC |c 1 |i A516217508 |f 12/1/2021 |g 1 |l STACKS |m P25UMARCHI |r N |s Y |t CD |u 12/1/2021 |1 STEM | ||