Ilyani Putri Jamal. (2016). Deposition of silicon carbon nitride by dual magnetron sputtering: Plasma diagnostic studies and material characterization.
Chicago Style (17th ed.) CitationIlyani Putri Jamal. Deposition of Silicon Carbon Nitride by Dual Magnetron Sputtering: Plasma Diagnostic Studies and Material Characterization. 2016.
MLA (8th ed.) CitationIlyani Putri Jamal. Deposition of Silicon Carbon Nitride by Dual Magnetron Sputtering: Plasma Diagnostic Studies and Material Characterization. 2016.
Warning: These citations may not always be 100% accurate.