Deposition of silicon carbon nitride by dual magnetron sputtering : plasma diagnostic studies and material characterization /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2016.
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| Subjects: | |
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| Physical Description: | xviii, 115 leaves : illustrations ; 30 cm. |
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| Bibliography: | Bibliography: leaves 109-114. |