Deposition of silicon carbon nitride by dual magnetron sputtering : plasma diagnostic studies and material characterization /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2016.
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| Subjects: | |
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| LEADER | 01146cam a2200313 i 4500 | ||
|---|---|---|---|
| 001 | u1045219 | ||
| 003 | SIRSI | ||
| 005 | 201612140957 | ||
| 008 | 161221s2016 my a m 000 0 eng | ||
| 040 | |a UMM |e rda | ||
| 090 | |a QC3 |b UM 2016 Ilypj | ||
| 100 | 0 | |a Ilyani Putri Jamal, |e author. | |
| 245 | 1 | 0 | |a Deposition of silicon carbon nitride by dual magnetron sputtering : |b plasma diagnostic studies and material characterization / |c Ilyani Putri Binti Jamal. |
| 264 | 1 | |c 2016. | |
| 264 | 4 | |c 2016. | |
| 300 | |a xviii, 115 leaves : |b illustrations ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b M.Sc. |c Jabatan Fizik, Fakulti Sains, Universiti Malaya |d 2016. | ||
| 504 | |a Bibliography: leaves 109-114. | ||
| 650 | 0 | |a Sputtering (Physics) | |
| 650 | 0 | |a Materials science. | |
| 650 | 0 | |a Silicon nitride. | |
| 650 | 0 | |a Plasma diagnostics. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Fizik, |e degree granting institution. | |
| 900 | |a NSR NSM | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UM 2016 ILYPJ |w LC |c 1 |i A516602656 |d 14/4/2017 |f 14/4/2017 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 5/4/2017 |1 STEM | ||