Deposition and characterization of germanium nitride film using different thermal nitridation temperature /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2018.
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| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/9625/ |
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| Physical Description: | xv, 76 leaves : illustrations (some colours) ; 30 cm. Also issued in CD. |
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| Bibliography: | Bibliography: leaves 70-76. |