Deposition and characterization of germanium nitride film using different thermal nitridation temperature /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2018.
|
| Subjects: | |
| Online Access: | http://studentsrepo.um.edu.my/9625/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 01516cam a2200373 i 4500 | ||
|---|---|---|---|
| 001 | u1105179 | ||
| 003 | SIRSI | ||
| 005 | 201901241535 | ||
| 008 | 190124s2018 my a m 000 0 eng | ||
| 040 | |a UMJ |d UMM |e rda | ||
| 090 | |a TA7 |b UM 2018 Low | ||
| 097 | |a TJ7 |b UM 2018 Low | ||
| 100 | 1 | |a Low, Yan Jie, |e author. | |
| 245 | 1 | 0 | |a Deposition and characterization of germanium nitride film using different thermal nitridation temperature / |c Low Yan Jie. |
| 264 | 1 | |c 2018. | |
| 300 | |a xv, 76 leaves : |b illustrations (some colours) ; |c 30 cm. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 338 | |a computer disc |2 rdacarrier | ||
| 502 | |b M.Eng. |c Jabatan Kejuruteraan Mekanik, Fakulti Kejuruteraan, Universiti Malaya |d 2018. | ||
| 504 | |a Bibliography: leaves 70-76. | ||
| 530 | |a Also issued in CD. | ||
| 650 | 0 | |a Germanium |x Analysis. | |
| 650 | 0 | |a Nitrides |x Thermal properties. | |
| 650 | 0 | |a Thin films. | |
| 710 | 2 | |a Universiti Malaya. |b Jabatan Kejuruteraan Mekanik, |e degree granting institution. | |
| 856 | 4 | 1 | |u http://studentsrepo.um.edu.my/9625/ |
| 596 | |a 1 7 | ||
| 900 | |a NSM | ||
| 999 | |a TA7 UM 2018 LOW |w LC |c 1 |i A517304185 |f 11/2/2019 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 11/2/2019 |1 STEM | ||
| 999 | |a TJ7 UM 2018 LOW |w LC |c 1 |i A516956185 |f 25/4/2019 |g 1 |l STACKS |m P07JURUTER |r Y |s Y |t TESIS |u 25/4/2019 |1 STEM | ||
| 999 | |a TJ7 UM 2018 LOW |w LC |c 2 |i A516956177 |f 25/4/2019 |g 1 |l COUNTER |m P07JURUTER |r Y |s Y |t CD |u 25/4/2019 |1 STEM | ||