Formation of ZrO2 gate dielectric on Ge substrate by thermal oxidation and post annealing for metal-oxide-semiconductor devices /
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| 格式: | Thesis 图书 |
| 语言: | English |
| 出版: |
2019.
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| 主题: | |
| 在线阅读: | http://studentsrepo.um.edu.my/11120/ |
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| 实物描述: | xxiv, 181 leaves : illustrations ; 30 cm Also issued in CD. |
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| 参考书目: | Bibliography: leaves 160-180. |