Formation of ZrO2 gate dielectric on Ge substrate by thermal oxidation and post annealing for metal-oxide-semiconductor devices /
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| 主要作者: | |
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| 格式: | Thesis 圖書 |
| 語言: | English |
| 出版: |
2019.
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| 主題: | |
| 在線閱讀: | http://studentsrepo.um.edu.my/11120/ |
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| 實物描述: | xxiv, 181 leaves : illustrations ; 30 cm Also issued in CD. |
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| 參考書目: | Bibliography: leaves 160-180. |